ALD2011 11th International Conference on Atomic Layer Deposition

  • Jaakko Niinistö (Speaker: Presenter)

Activity: Participating in or organising an event types › Organisation and participation in conferences, workshops, courses, seminars

Description

Conformality of remote plasma enhanced ALD processes: an experimental study
Period26 Jun 2011 → 29 Jun 2011
Event typeOther
SponsorAVS
LocationBoston, MA, United StatesShow on map