ALD2011 11th International Conference on Atomic Layer Deposition

  • Jaakko Niinistö (Speaker: Presenter)

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars


Conformality of remote plasma enhanced ALD processes: an experimental study
Period26 Jun 201129 Jun 2011
Event typeOther
LocationBoston, MA, United StatesShow on map