Baltic ALD 2014

  • Emma Salmi (Poster Presentation)

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars

Description

Residual Stresses in Atomic Layer Deposited Tantalum Oxide Thin Films
Period12 May 201413 May 2014
Event typeOther
Conference number12
Sponsor
LocationHelisinki, Finland
Degree of RecognitionInternational