Formation of Meta-Stable SiOx in a 3D Nanoscale Volume by Ion Beam Mixing for Self-Assembly of a Single Si Quantum Dot

Fridlund, C. (Speaker)

Activity: Talk or presentation types › Oral presentation

Period18 Sep 2016 - 22 Sep 2016
Held atE-MRS Fall Meeting
Event typeOther
LocationWarsaw, Poland
Degree of RecognitionInternational