High temperature XRD and XRR studies on atomic layer deposited niobium oxide - silicon oxide nanolaminates

Heikkilä, M. (Speaker)

Activity: Talk or presentation types › Oral presentation

Period27 Jun 2019
Event titleJoint EuroCVD 22 - Baltic ALD 16 meeting
Event typeConference
LocationLuxemburg, Luxembourg
Degree of RecognitionInternational

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