HelsinkiALD

Research output

Research output per year 1999 2020 2021 2022 2023 2025

• 144 Article
• 10 Commissioned report
• 6 Conference contribution
• 5 Review Article
• 11 More
  • 4 Patent
  • 3 Chapter
  • 1 Anthology or special issue
  • 1 Book
  • 1 Conference article
  • 1 Digital or Visual Products

Research output per year

Research output per year

Search results

• 2012

  Precursors for ALD processes, In: Atomic Layer Deposition of Nanostructured Materials

  Putkonen, M., 2012, Precursors for ALD processes.

  Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

• 2011

  Challenges in ALD.

  Leskelä, M., 2011, Atomic Layer Deposition of Nanostructured Materials. Pinna, N. & Knez, M. (eds.). Wiley-VCH, p. 401-422 23 p.

  Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific

• Precursors for ALD Processes

  Putkonen, M., Pinna, N. & Knez, M., 2011, Atomic Layer Deposition of Nanostructured Materials.

  Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review