Research output per year
Research output per year
Search results
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2021
Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond
Mattinen, M., Leskelä, M. & Ritala, M., Mar 2021, In: Advanced Materials Interfaces . 8, 6, 47 p., 2001677.Research output: Contribution to journal › Review Article › peer-review
Open AccessFile -
2014
Atomic Layer Deposition of Noble Metals and Their Oxides
Hämäläinen, J., Ritala, M. & Leskelä, M., 2014, In: Chemistry of Materials. 26, 1, p. 786-801 16 p.Research output: Contribution to journal › Review Article › peer-review
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2004
Some recent developments in the MOCVD and ALD of high-kappa dielectric oxides
Jones, A. C., Aspinall, H. C., Chalker, P. R., Potter, R. J., Kukli, K., Rahtu, A., Ritala, M. & Leskelä, M., 2004, In: Journal of Materials Chemistry. 14, p. 3101-3112 12 p.Research output: Contribution to journal › Review Article › peer-review
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2002
Atomic layer deposition (ALD): from precursors to thin film structures
Leskelä, M. & Ritala, M., 2002, In: Thin Solid Films. 409, 1, p. 138-146 9 p.Research output: Contribution to journal › Review Article › peer-review
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1999
ALD precursor chemistry: Evolution and future challenges
Leskelä, M. & Ritala, M., 1999, In: Journal de physique. IV. 9, p. 837-852 16 p.Research output: Contribution to journal › Review Article › peer-review