Research output per year
Research output per year
Search results
-
2016
Atomic Layer Deposition of Metal Phosphates and Lithium Silicates
Hamalainen, J., Holopainen, J., Hatanpaa, T., Ritala, M. & Leskela, M., 19 Apr 2016, Patent No. US9315894 B2, 19 Apr 2016Research output: Patent
-
2013
Synthesis and Application for tellurium and selenium ald precursor film
Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 25 Dec 2013, IPC No. C23C16/06, H01L21/205, C23C16/44, C23C16/16, Patent No. CN 102076882 B, 23 Apr 2009, Priority date 25 Apr 2008Research output: Patent
-
2010
Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films.
Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 14 Jan 2010, IPC No. C23C 16/455, Patent No. 2010/0009078 A1Research output: Patent
-
2002
Process for producing metal thin films by ALD
Aaltonen, T., Alén , P., Ritala, M. & Leskelä, M., 2002, IPC No. B05D/512, Patent No. 6824816 , 30 Nov 2004Research output: Patent