Micronova - Centre for micro- and nanotechnology

    Facility/equipment: Equipment

    Equipments Details


    Micronova is a research centre jointly run by the VTT Technical Research Centre of Finland and Aalto University, which provides micro- and nanofabrication facilities for the development of microelectronic, photonic, microsystems and nanoelectronic components and devices. The biggest in the Nordic countries, Micronova’s cleanroom facilities in Otaniemi, Espoo, cover 2,600 m2. They are used by researchers from VTT, Aalto University and other universities as well as several companies. The cleanrooms are also used for educational purposes and researcher training.

    Type of research infrastructure

    • Equipment

    Fields of Science and Free Keywords

    • 216 Materials engineering