Research output per year
Research output per year
Personal profile
Fields of Science
- 116 Chemical sciences
- 216 Materials engineering
- 221 Nano-technology
Publications
- 6 Article
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Atomic Layer Deposition of CsI and CsPbI3
Weiss, A., Popov, G., Atosuo, E. K., Vihervaara, A., Jalkanen, P., Vehkamäki, M., Leskelä, M., Ritala, M. & Kemell, M., 12 Jul 2022, In: Chemistry of Materials. 34, 13, p. 6087-6097 11 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Atomic layer deposition of GdF3 thin films
Atosuo, E., Mizohata, K., Mattinen, M., Mäntymäki, M., Vehkamäki, M., Leskelä, M. & Ritala, M., Mar 2022, In: Journal of Vacuum Science Technology A: Vacuum, Surfaces, and Films. 40, 2, 8 p., 022402.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Atomic layer deposition of TbF3 thin films
Atosuo, E., Ojala, J., Heikkila, M. J., Mattinen, M., Mizohata, K., Raisanen, J., Leskela, M. & Ritala, M., Mar 2021, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 39, 2, 7 p., 022404.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia
Mäntymäki, M., Atosuo, E., Heikkilä, M. J., Vehkamäki, M., Mattinen, M., Mizohata, K., Räisänen, J., Ritala, M. & Leskelä, M., Mar 2019, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 37, 2, 8 p., 020929.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
Atosuo, E., Mäntymäki, M., Mizohata, K., Heikkilä, M. J., Räisänen, J., Ritala, M. & Leskelä, M., 14 Feb 2017, In: Chemistry of Materials. 29, 3, p. 998-1005 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Activities
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EuroCVD 22 Baltic ALD 16 2019
Elisa Karoliina Atosuo (Attendee)
24 Jun 2019 → 28 Jun 2019Activity: Participating in or organising an event types › Organisation and participation in conferences, workshops, courses, seminars
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2018 E-MRS Fall Meeting and Exhibit
Elisa Karoliina Atosuo (Poster Presentation)
17 Sep 2018 → 20 Sep 2018Activity: Participating in or organising an event types › Organisation and participation in conferences, workshops, courses, seminars
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2017 E-MRS Fall Meeting and Exhibit
Elisa Karoliina Atosuo (Speaker)
18 Sep 2017 → 21 Sep 2017Activity: Talk or presentation types › Oral presentation
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Baltic ALD 2015
Elisa Karoliina Atosuo (Speaker: Presenter)
29 Sep 2015Activity: Participating in or organising an event types › Public Talks