Research output per year
Research output per year
Personal profile
Fields of Science
- 116 Chemical sciences
International and National Collaboration
Publications and projects within past five years.
Publications
- 10 Article
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Ambient pressure x-ray photoelectron spectroscopy study on the initial atomic layer deposition process of platinum
Kokkonen, E., Nieminen, H.-E., Rehman, F., Miikkulainen, V., Putkonen, M., Ritala, M., Huotari, S., Schnadt, J. & Urpelainen, S., Dec 2024, In: Journal of Vacuum Science Technology A: Vacuum, Surfaces, and Films. 42, 6, 8 p., 062406.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes
Nieminen, H.-E., Chundak, M., Heikkila, M. J., Karkkainen, P. R., Vehkamaki, M., Putkonen, M. & Ritala, M., Mar 2023, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 41, 2, 11 p., 022401.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
In vacuo studies on reaction mechanisms in ALD processes of ruthenium and platinum films
Nieminen, H., Putkonen, M. & Ritala, M., 25 Nov 2023, In: Applied Surface Science. 648, 10 p., 159015.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Reductive Thermal Atomic Layer Deposition Process for Gold
Vihervaara, A., Hatanpää, T., Nieminen, H., Mizohata, K., Chundak, M. & Ritala, M., May 2023, In: ACS materials Au. 3, 3, p. 206-214 9 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Ambient pressure x-ray photoelectron spectroscopy setup for synchrotron-based in situ and operando atomic layer deposition research
Kokkonen, E., Kaipio, M., Nieminen, H.-E., Rehman, F., Miikkulainen, V., Putkonen, M., Ritala, M., Huotari, S., Schnadt, J. & Urpelainen, S., 1 Jan 2022, In: Review of Scientific Instruments. 93, 1, 13 p., 013905.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile
Prizes
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ALD 2023 Best Oral Presentation Finalist
Nieminen, H. (Recipient), 24 Jul 2023
Prize: Prizes and awards
Activities
- 2 Oral presentation
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Reaction mechanism studies on ALD processes of Pt and Ru
Nieminen, H. (Speaker)
24 Jul 2023Activity: Talk or presentation types › Oral presentation
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In vacuo cluster tool for studying the reaction mechanisms in ALD and ALE processes
Nieminen, H. (Speaker)
28 Jun 2022Activity: Talk or presentation types › Oral presentation