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Publications 1987 2013

  • 2 Article
  • 1 Conference article
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Conference article
1988

DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON

LAHTINEN, J., VEHANEN, A., PUNKKA, E., HAUTOJARVI, P., KEINONEN, J., HAUTALA, M., RAUHALA, E., KARTTUNEN, KURONEN, A. & RAISANEN, J., Jul 1988, In : Surface and Interface Analysis. 12, 1-12, p. 325-326 2 p.

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