No photo of Juha Aaltonen
  • PL 64 (Gustaf Hällströmin katu 2)

    00014

    Finland

20052013
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Publications 2005 2013

  • 12 Conference contribution
  • 8 Article
  • 4 Conference article

Nondestructive Inspection of Buried Channels and Cavities in Silicon

Kassamakov, I., Grigoras, K., Heikkinen, V., Hanhijarvi, K., Aaltonen, J., Franssila, S. & Haeggstrom, E., Apr 2013, In : IEEE Journal of Microelectromechanical Systems. 22, 2, p. 438-442 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

Hanhijarvi, K., Kassamakov, I., Aaltonen, J., Heikkinen, V., Sainiemi, L., Franssila, S. & Haeggstrom, E., Aug 2013, In : IEEE - ASME Transactions on Mechatronics. 18, 4, p. 1418-1420 3 p.

Research output: Contribution to journalArticleScientificpeer-review

3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY

Heikkinen, V., Ylitalo, T. J., Nolvi, A., Hanhijärvi, K., Aaltonen, J. P., Kassamakov, I. V. & Haeggström, E., 2012, Physics Days: The 46th annual meeting of the Finnish Physical Society, proceedings. Joensuu, p. 112 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

CHARACTERIZING MULTILAYER PRINTED DRUGS WITH SWLI

Ylitalo, T. J., Ehlers, H., Nolvi, A., Heikkinen, V., Aaltonen, J. P., Kassamakov, I. V., Sandler, N. & Haeggström, E., 2012, Physics Days: The 46th annual meeting of the Finnish Physical Society, proceedings. Joensuu, p. 142 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

IR-SWLI for subsurface imaging of large MEMS structures

Nolvi, A., Heikkinen, V., Kassamakov, I. V., Aaltonen, J. P., Ylitalo, T. J., Saresoja, O. A., Berdova, M., Franssila, S. & Haeggström, E., 26 Apr 2012, Optical Micro- and Nanometrology IV: Optical Micro- and Nanometrology IV. SPIE, p. 843018 (Proceedings of SPIE, the International Society for Optical Engineering; vol. 8430).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review