Juha Tapani Ojala — University of Helsinki

Emailjuha.t.ojalahelsinkifi

Research activity per year

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Fields of Science

116 Chemical sciences
Atomic Layer Etching
atomic layer deposition (ALD)
Thin Films

1 Article

Atomic layer deposition of TbF3 thin films
Atosuo, E., Ojala, J., Heikkila, M. J., Mattinen, M., Mizohata, K., Raisanen, J., Leskela, M. & Ritala, M., Mar 2021, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 39, 2, 7 p., 022404.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
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