Research output per year
Research output per year
Personal profile
Fields of Science
- 116 Chemical sciences
- Atomic Layer Etching
- atomic layer deposition (ALD)
- Thin Films
Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
Research output
- 3 Article
-
Atomic Layer Etching of Tantalum with NbCl5 and O2
Ojala, J., Pykalainen, P., Chundak, M., Vihervaara, A., Vehkamaki, M. & Ritala, M., 14 May 2025, In: Chemistry of Materials. 37, 10, p. 3822-3829 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Selective gas phase pulsed etching of oxides with NbCl5
Ojala, J., Vehkamaeki, M., Chundak, M., Vihervaara, A., Mizohata, K. & Ritala, M., 9 Dec 2024, In: Journal of Materials Chemistry C. 9 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Atomic layer deposition of TbF3 thin films
Atosuo, E., Ojala, J., Heikkila, M. J., Mattinen, M., Mizohata, K., Raisanen, J., Leskela, M. & Ritala, M., Mar 2021, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 39, 2, 7 p., 022404.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile