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Keywords

  • 116 Chemical sciences

International and National Collaboration Publications and projects within past five years.

Publications 2017 2019

Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films

Väyrynen, K., Hatanpää, T., Mattinen, M., Mizohata, K., Meinander, K., Räisänen, J., Link, J., Stern, R., Ritala, M. & Leskela, M., Feb 2019, In : Advanced Materials Interfaces . 6, 3, 7 p., 1801291.

Research output: Contribution to journalArticleScientificpeer-review

(Invited) Photo-Assisted ALD: Process Development and Application Perspectives

Miikkulainen, V., Väyrynen, K., Kilpi, V., Han, Z., Vehkamäki, M., Mizohata, K., Räisänen, J. & Ritala, M., 2017, In : ECS transactions. 80, 3, p. 49-60 12 p.

Research output: Contribution to journalArticleScientificpeer-review

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