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Publications 2017 2019

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2019

Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films

Väyrynen, K., Hatanpää, T., Mattinen, M., Mizohata, K., Meinander, K., Räisänen, J., Link, J., Stern, R., Ritala, M. & Leskela, M., Feb 2019, In : Advanced Materials Interfaces . 6, 3, 7 p., 1801291.

Research output: Contribution to journalArticleScientificpeer-review

2017

(Invited) Photo-Assisted ALD: Process Development and Application Perspectives

Miikkulainen, V., Väyrynen, K., Kilpi, V., Han, Z., Vehkamäki, M., Mizohata, K., Räisänen, J. & Ritala, M., 2017, In : ECS transactions. 80, 3, p. 49-60 12 p.

Research output: Contribution to journalArticleScientificpeer-review

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Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)(2) and Tertiary Butyl Hydrazine

Väyrynen, K., Mizohata, K., Räisänen, J., Peeters, D., Devi, A., Ritala, M. & Leskelä, M., 8 Aug 2017, In : Chemistry of Materials. 29, 15, p. 6502-6510 9 p.

Research output: Contribution to journalArticleScientificpeer-review