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  • PL 43 (Pietari Kalmin katu 2)

    00014

    Finland

20072019
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Publications 2007 2019

  • 76 Article
  • 1 Conference contribution
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Article

Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films

Väyrynen, K., Hatanpää, T., Mattinen, M., Mizohata, K., Meinander, K., Räisänen, J., Link, J., Stern, R., Ritala, M. & Leskela, M., Feb 2019, In : Advanced Materials Interfaces . 6, 3, 7 p., 1801291.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of PbI₂ Thin Films

Popov, G., Mattinen, M. J., Hatanpää, T., Vehkamäki, M., Kemell, M., Mizohata, K., Räisänen, J., Ritala, M. & Leskelä, M., 12 Feb 2019, In : Chemistry of Materials. 31, 3, p. 1101–1109 9 p.

Research output: Contribution to journalArticleScientificpeer-review

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Charge carrier dynamics in tantalum oxide overlayered and tantalum doped hematite photoanodes

Ruoko, T-P., Hiltunen, A., Iivonen, T., Ulkuniemi, R., Lahtonen, K., Ali-Löytty, H., Mizohata, K., Valden, M., Leskelä, M. & Tkachenko, N. V., 21 Feb 2019, In : Journal of Materials Chemistry. A. 7, 7, p. 3206-3215 10 p.

Research output: Contribution to journalArticleScientificpeer-review

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Open Access
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Deposition of impurity metals during campaigns with the JET ITER-like Wall

Widdowson, A., Coad, J. P., Alves, E., Baron-Wiechec, A., Catarino, N., Corregidor, V., Heinola, K., Krat, S., Makepeace, C., Matthews, G. F., Mayer, M., Mizohata, K. & Sertoli, M., 6 Mar 2019, In : Nuclear Materials and Energy. 19, p. 218-224 7 p.

Research output: Contribution to journalArticleScientificpeer-review

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Direct observation of mono-vacancy and self-interstitial recovery in tungsten

Heikinheimo, J., Mizohata, K., Räisänen, J., Ahlgren, T., Jalkanen, P., Lahtinen, A., Catarino, N., Alves, E. & Tuomisto, F., Feb 2019, In : Physical Review Materials. 7, 2, 5 p., 021103.

Research output: Contribution to journalArticleScientificpeer-review

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Hydrogen isotope exchange in tungsten during annealing in hydrogen atmosphere

Ahlgren, T., Jalkanen, P., Mizohata, K., Tuboltsev, V., Räisänen, J., Heinola, K. & Tikkanen, P. O., Feb 2019, In : Nuclear Fusion. 59, 2, 026016.

Research output: Contribution to journalArticleScientificpeer-review

Intercalation of Lithium Ions from Gaseous Precursors into β-MnO2 Thin Films Deposited by Atomic Layer Deposition

Nieminen, H., Miikkulainen, V., Settipani, D., Simonelli, L., Hönicke, P., Zech, C., Kayser, Y., Beckhoff, B., Honkanen, A-P., Heikkilä, M., Mizohata, K., Meinander, N. K., Ylivaara, O. M. E., Huotari, S. & Ritala, M., 3 Jun 2019, In : Journal of Physical Chemistry C. 123, p. 15802-15814

Research output: Contribution to journalArticleScientificpeer-review

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2018

Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing

Mattinen, M., King, P. J., Khriachtchev, L., Heikkilä, M. J., Fleming, B., Rushworth, S., Mizohata, K., Meinander, K., Räisänen, J., Ritala, M. & Leskelä, M., Sep 2018, In : Materials today chemistry. 9, p. 17-27 11 p.

Research output: Contribution to journalArticleScientificpeer-review

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Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties

Seppälä, S., Niinistö, J., Mattinen, M., Mizohata, K., Räisänen, J., Noh, W., Ritala, M. & Leskelä, M., 30 Aug 2018, In : Thin Solid Films. 660, p. 199-206 8 p.

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Atomic Layer Deposition of Molybdenum and Tungsten Oxide Thin Films Using Heteroleptic Imido-Amidinato Precursors: Process Development, Film Characterization, and Gas Sensing Properties

Mattinen, M., Wree, J-L., Stegmann, N., Ciftyurek, E., El Achhab, M., King, P. J., Mizohata, K., Räisänen, J., Schierbaum, K. D., Devi, A., Ritala, M. & Leskelä, M., 11 Dec 2018, In : Chemistry of Materials. 30, 23, p. 8690-8701 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Rhenium Disulfide

Hämäläinen, J., Mattinen, M., Mizohata, K., Meinander, K., Vehkamäki, M., Räisänen, J., Ritala, M. & Leskelä, M., 13 Jun 2018, In : Advanced Materials. 30, 24, p. 1703622 6 p., 1703622.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone

Kukli, K., Kemell, M., Mizohata, K., Vehkamäki, M., Kalam, K., Castan, H., Duenas, S., Link, J., Stern, R., Ritala, M. & Leskelä, M., 2018, In : ECS Journal of Solid State Science and Technology. 7, 2, p. P1-P8 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Effect of Au ion beam on structural, surface, optical and electrical properties of ZnO thin films prepared by RF sputtering

Khan, M. F., Siraj, K., Sattar, A., Majeed, S., Faiz, H., Khan, M. I., Räisänen, J., Mizohata, K. & Kemell, M., 1 Oct 2018, In : Ceramics International. 44, 14, p. 16464-16469 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition

Hämäläinen, J., Mizohata, K., Meinander, K., Mattinen, M., Vehkamäki, M., Räisänen, J., Ritala, M. & Leskelä, M., 26 Oct 2018, In : Angewandte Chemie (International Edition). 57, 44, p. 14538-14542 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Tracing Grog and Pots to Reveal Neolithic Corded Ware Culture Contacts in the Baltic Sea Region (SEM-EDS, PIXE)

Holmqvist, E., Larsson, Å. M., Kriiska, A., Palonen, V., Pesonen, P., Mizohata, K., Kouki, P. & Räisänen, J., Mar 2018, In : Journal of Archaeological Science. 91, p. 77-91 15 p.

Research output: Contribution to journalArticleScientificpeer-review

2017

(Invited) Photo-Assisted ALD: Process Development and Application Perspectives

Miikkulainen, V., Väyrynen, K., Kilpi, V., Han, Z., Vehkamäki, M., Mizohata, K., Räisänen, J. & Ritala, M., 2017, In : ECS transactions. 80, 3, p. 49-60 12 p.

Research output: Contribution to journalArticleScientificpeer-review

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Atomic layer deposition and properties of mixed Ta2O5 and ZrO2 films

Kukli, K., Kemell, M., Vehkamäki, M., Heikkilä, M. J., Mizohata, K., Kalam, K., Ritala, M., Leskelä, M., Kundrata, I. & Frohlich, K., Feb 2017, In : AIP Advances. 7, 2, 15 p., 025001.

Research output: Contribution to journalArticleScientificpeer-review

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Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth

Mattinen, M., Hatanpaa, T., Sarnet, T., Mizohata, K., Meinander, K., King, P. J., Khriachtchev, L., Räisänen, J., Ritala, M. & Leskelä, M., 22 Sep 2017, In : Advanced Materials Interfaces . 4, 18, 11 p., 1700123.

Research output: Contribution to journalArticleScientificpeer-review

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Atomic Layer Deposition of Zinc Glutarate Thin Films

Salmi, L. D., Mattinen, M. J., Niemi, T. Y. M., Heikkilä, M. J., Mizohata, K., Korhonen, S., Hirvonen, S-P., Räisänen, J. A. & Ritala, M. K., Sep 2017, In : Advanced Materials Interfaces . 4, 22, 6 p., 1700512 .

Research output: Contribution to journalArticleScientificpeer-review

Enhanced process and composition control for atomic layer deposition with lithium trimethylsilanolate

Ruud, A., Miikkulainen, V., Mizohata, K., Fjellvag, H. & Nilsen, O., 2017, In : Journal of vacuum science & technology : an official journal of the American Vacuum Society. 35, 1, 8 p., ARTN 01B133.

Research output: Contribution to journalArticleScientificpeer-review

Instability of the Sb vacancy in GaSb

Segercrantz, N., Slotte, J., Tuomisto, F., Mizohata, K. & Räisänen, J., 3 May 2017, In : Physical Review B. 95, 18, 5 p., 184103.

Research output: Contribution to journalArticleScientificpeer-review

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Low-Temperature Atomic Layer Deposition of Cobalt Oxide as an Effective Catalyst for Photoelectrochemical Water-Splitting Devices

Kim, J., Iivonen, T., Hämäläinen, J., Kemell, M., Meinander, K., Mizohata, K., Wang, L., Räisänen, J., Beranek, R., Leskelä, M. & Devi, A., 25 Jul 2017, In : Chemistry of Materials. 29, 14, p. 5796-5805 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)(2) and Tertiary Butyl Hydrazine

Väyrynen, K., Mizohata, K., Räisänen, J., Peeters, D., Devi, A., Ritala, M. & Leskelä, M., 8 Aug 2017, In : Chemistry of Materials. 29, 15, p. 6502-6510 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films

Atosuo, E., Mäntymäki, M., Mizohata, K., Heikkilä, M. J., Räisänen, J., Ritala, M. & Leskelä, M., 14 Feb 2017, In : Chemistry of Materials. 29, 3, p. 998-1005 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Studies on Li3AlF6 thin film deposition utilizing conversion reactions of thin films

Mäntymäki, M. J., Mizohata, K., Heikkilä, M. J., Räisänen, J. A., Ritala, M. K. & Leskelä, M. A., 2017, In : Thin Solid Films. 636, p. 26-33 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Studies on Thermal Atomic Layer Deposition of Silver Thin Films

Mäkelä, M., Hatanpää, T., Mizohata, K., Meinander, K., Niinistö, J., Räisänen, J., Ritala, M. & Leskelä, M., 14 Mar 2017, In : Chemistry of Materials. 29, 5, p. 2040-2045 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Thermal Atomic Layer Deposition of Continuous and Highly Conducting Gold Thin Films

Mäkelä, M. I., Hatanpää, T. T., Mizohata, K., Räisänen, J. A., Ritala, M. K. & Leskelä, M. A., 27 Jun 2017, In : Chemistry of Materials. 29, 14, p. 6130–6136 7 p.

Research output: Contribution to journalArticleScientificpeer-review

2016

Alkylsilyl compounds as enablers of atomic layer deposition: analysis of (Et3Si)(3)As through the GaAs process

Sarnet, T., Hatanpää, T., Laitinen, M., Sajavaara, T., Mizohata, K., Ritala, M. & Leskelä, M., 2016, In : Journal of Materials Chemistry. C. 4, 3, p. 449-454 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition of aluminum oxide on modified steel substrates

Kukli, K., Salmi, E., Jogiaas, T., Zabels, R., Schuisky, M., Westlinder, J., Mizohata, K., Ritala, M. & Leskelä, M., 25 Oct 2016, In : Surface & Coatings Technology. 304, p. 1-8 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Iridium Thin Films Using Sequential Oxygen and Hydrogen Pulses

Mattinen, M., Hämäläinen, J., Vehkamäki, M., Heikkilä, M. J., Mizohata, K., Jalkanen, P., Räisänen, J., Ritala, M. & Leskelä, M., 21 Jul 2016, In : Journal of Physical Chemistry C. 120, 28, p. 15235-15243 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Bismuth iron oxide thin films using atomic layer deposition of alternating bismuth oxide and iron oxide layers

Puttaswamy, M., Vehkamäki, M., Kukli, K., Dimri, M. C., Kemell, M., Hatanpää, T., Heikkilä, M. J., Mizohata, K., Stern, R., Ritala, M. & Leskelä, M., 29 Jul 2016, In : Thin Solid Films. 611, p. 78-87 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Electric and Magnetic Properties of ALD-Grown BiFeO3 Films

Marchand, B., Jalkanen, P., Tuboltsev, V., Vehkamäki, M., Puttaswamy, M., Kemell, M., Mizohata, K., Hatanpää, T., Savin, A., Räisänen, J., Ritala, M. & Leskelä, M., 7 Apr 2016, In : Journal of Physical Chemistry C. 120, 13, p. 7313-7322 10 p.

Research output: Contribution to journalArticleScientificpeer-review

ESR spectroscopy of alanine impacted by high energy irradiations for wide range dosimetry

Ceponis, T., Gaubas, E., Venius, J., Cicinas, A., Callens, F., Kusakovskij, J., Vrielinck, H., Mizohata, K., Räisänen, J. & Tikkanen, P., 2016, In : Lithuanian Journal of Physics. 56, 1, p. 49-54 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access

External beam IBA set-up with large-area thin Si3N4 window

Palonen, V., Mizohata, K., Nissinen, T. & Räisänen, J., Aug 2016, In : Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 380, p. 11-14 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Heteroleptic Cyclopentadienyl-Amidinate Precursors for Atomic Layer Deposition (ALD) of Y, Pr, Gd, and Dy Oxide Thin Films

Seppälä, S., Niinistö, J., Blanquart, T., Kaipio, M., Mizohata, K., Räisänen, J., Lansalot-Matras, C., Noh, W., Ritala, M. & Leskelä, M., 11 Jul 2016, In : Chemistry of Materials. 28, 15, p. 5440-5449 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Influence of temperature-induced copper diffusion on degradation of selective chromium oxy-nitride solar absorber coatings

Kotilainen, M., Honkanen, M., Mizohata, K. & Vuoristo, P., Feb 2016, In : Solar Energy Materials and Solar Cells. 145, 3, p. 323-332 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Low-temperature atomic layer deposition of copper(II) oxide thin films

Iivonen, T., Hämäläinen, J., Marchand, B., Mizohata, K., Mattinen, M., Popov, G., Kim, J., Fischer, R. A. & Leskelä, M., 2016, In : Journal of vacuum science & technology : an official journal of the American Vacuum Society. 34, 1, 01A109.

Research output: Contribution to journalArticleScientificpeer-review

MANOS performance dependence on ALD Al2O3 oxidation source

Nikolaou, N., Dimitrakis, P., Normand, P., Speliotis, T., Kukli, K., Niinistö, J., Mizohata, K., Ritala, M., Leskelä, M. & Ioannou-Sougleridis, V., 15 Jun 2016, In : Microelectronic Engineering. 159, p. 127-131 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition

Mattinen, M., Hämäläinen, J., Gao, F., Jalkanen, P., Mizohata, K., Räisänen, J., Puurunen, R. L., Ritala, M. & Leskelä, M., 18 Oct 2016, In : Langmuir. 32, 41, p. 10559-10569 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Potential gold(I) precursors evaluated for atomic layer deposition

Mäkelä, M. I., Hatanpää, T. T., Ritala, M. K., Leskelä, M. A., Mizohata, K., Meinander, N. K. & Räisänen, J. A., 23 Nov 2016, In : Journal of Vacuum Science Technology A: Vacuum, Surfaces, and Films. 35, 1, 9 p., 01B112.

Research output: Contribution to journalArticleScientificpeer-review