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Keywords

  • 116 Chemical sciences

International and National Collaboration Publications and projects within past five years.

Publications 1994 2019

Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films

Kukli, K., Kemell, M., Castan, H., Duenas, S., Seemen, H., Rähn, M., Link, J., Stern, R., Heikkilä, M. J., Ritala, M. & Leskelä, M., 2018, In : ECS Journal of Solid State Science and Technology. 7, 5, p. P287-P294 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition and Properties of HfO2-Al2O3 Nanolaminates

Kukli, K., Kemell, M., Castan, H., Duenas, S., Seemen, H., Rähn, M., Link, J., Stern, R., Ritala, M. & Leskelä, M., 6 Sep 2018, In : ECS Journal of Solid State Science and Technology. 7, 9, p. P501-P508 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File

Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing

Mattinen, M., King, P. J., Khriachtchev, L., Heikkilä, M. J., Fleming, B., Rushworth, S., Mizohata, K., Meinander, K., Räisänen, J., Ritala, M. & Leskelä, M., Sep 2018, In : Materials today chemistry. 9, p. 17-27 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File

Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties

Seppälä, S., Niinistö, J., Mattinen, M., Mizohata, K., Räisänen, J., Noh, W., Ritala, M. & Leskelä, M., 30 Aug 2018, In : Thin Solid Films. 660, p. 199-206 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File

Projects 1970 2021

Finnish Centre of Excellence in Atomic Layer Deposition

Leskelä, M. A.

01/01/201831/12/2019

Project: Research project

Itsejärjestyneet rakenteet

Leskelä, M. A.

16/01/2006 → …

Project: Research project

New olefin polymerization catalysts

Leskelä, M. A.

15/03/201715/03/2018

Project: Research project

Prizes

A.I. Virtanen palkinto

Markku Antero Leskelä (Recipient), 10 Nov 2011

Prize: Prizes and awards

A.I. Virtanen palkinto

Markku Antero Leskelä (Recipient), 10 Nov 2011

Prize: Prizes and awards

American Vacuum Society ALD award

Markku Antero Leskelä (Recipient), 18 Jun 2012

Prize: Prizes and awards

Atomic Layer Deposition Innovation award

Markku Antero Leskelä (Recipient), 18 Jun 2012

Prize: Prizes and awards

Activities 1983 2018

Väitöskirjan ennakkotarkastaja

Markku Leskelä (Pre-examiner)
19 Nov 2018

Activity: Examination typesPre-examiner of doctoral thesis

Väitöskirjan ennakkotarkastaja

Markku Leskelä (Pre-examiner)
5 May 20185 Jun 2018

Activity: Examination typesPre-examiner of doctoral thesis

Vastaväittäjä

Markku Leskelä (Opponent)
29 Nov 2018

Activity: Examination typesOpponent of doctoral dissertation

Tiedekeskus Heureka (External organisation)

Markku Leskelä (Member)
1 Jan 201831 Dec 2019

Activity: Membership typesMembership or other role in national/international committee, council, board

27th Materials for Advanced Metallization Conference

Markku Leskelä (Speaker: Presenter)
18 Mar 201821 Mar 2018

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars

Press / Media

Haastattelu Helsingin Sanomissa

Markku Antero Leskelä

22/12/2014

1 media contribution

Press/Media: Press / Media