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Publications 1994 2019

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2017

Admittance memory cycles of Ta2O5-ZrO2-based RRAM devices

Duenas, S., Castan, H., Ossorio, O. G., Dominguez, L. A., Gracia, H., Kalam, K., Kukli, K., Ritala, M. & Leskelä, M., 2017, 2017 32ND CONFERENCE ON DESIGN OF CIRCUITS AND INTEGRATED SYSTEMS (DCIS). IEEE, 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2016

Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)

Autere, A., Karvonen, L., Säynätjoki, A., Roussey, M., Roenn, J., Färm, E., Kemell, M., Tu, X., Liow, T-Y., Lo, P., Ritala, M., Leskelä, M., Lipsanen, H., Honkanen, S. & Sun, Z., 2016, Silicon Photonics and Photonic Integrated Circuits V, proceedings. Pavesi, L., Vivien, L. & Pelli, S. (eds.). Brussels: SPIE, Vol. 9891. 98910

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2015

High-quality slot waveguide ring resonator based on atomic layer deposition

Autere, A., Karvonen, L., Saynatjoki, A., Roussey, M., Färm, E., Kemell, M., Tu, X., Liow, T. Y., Lo, G. Q., Ritala, M., Leskelä, M., Honkanen, S. & Sun, Z., 2015, SILICON PHOTONICS X . Reed, GT. & Watts, MR. (eds.). SPIE, 7 p. 93671J. (Proceedings of SPIE ; vol. 9367 ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Resistless fabrication of embedded nanochannels by FIB patterning, wet etching and atomic layer deposition

Han, Z., Vehkamäki, M. J., Leskelä, M. & Ritala, M. K., 2015, Proceedings of the 15th IEEE International Conference on Nanotechnology. IEEE, p. 1008-1011 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

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2014

Heteroleptic Precursors for Atomic Layer Deposition

Niinisto, J., Blanquart, T., Seppala, S., Ritala, M. & Leskela, M., 2014, Atomic Layer Deposition Applications 10. Roozeboom, F., DeGendt, S., Delabie, A., Elam, JW., Londergan, A. & VanDerStraten, O. (eds.). ELECTROCHEMICAL SOC INC, p. 221-232 12 p. (ECS Transactions; vol. 64, no. 9).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2012

Selective oxidation of glucuronic acid into glucaric acid

Rautiainen, S., Chen, J., Niemelä, K., Repo, T. & Leskelä, M., Aug 2012, IIS 2012 Heidelberg, Germany, September 09-13, 2012: Scientific Program and Book of Abstracts.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Single-step preparation of 2-methyltetrahydrofuran from birch

Riekkola, T., Leskelä, M. & Repo, T., 2012, Program and Book of Abstracts of the International IUPAC Conference on Green Chemistry. Vol. 2012. p. 319 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

2011

Atomic Layer Deposition of GeTe

Sarnet, T., Pore, V., Hatanpää, T., Ritala, M., Leskelä, M., Schrott, A., Zhu, Y., Raoux, S. & Cheng, H-Y., 2011, European\Phase Change and Ovonics Symposium 2011 Proceedings. p. 210-211 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Avaliação morfológica e dinâmico-mecânica de mixturas de PP/PA6 polímeros biodegradáveis como compatibilizantes.

de Paula Amantes, B., Vuorinen, S. E., Grafova, I., Leskelä, M., Grafov, A. & Vieira Marques, M. D. F., Oct 2011, Congresso Brasileiro de Polímeros, CBPol. Associação Brasileira de Polímeros

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

CatOX lignin: Fresh material for lignin applications

Riekkola, T. M., Asikkala, J., Wrigstedt, P. J., Hakola, M. K., Tamminen, T., Ohra-aho, T., Argyropoulos, D., Sipilä, A. J., Leskelä, M. A. & Repo, T. J., 2011,  241st ACS National Meeting & Exposition, Abstracts of Papers. Anaheim, California: American Chemical Society, Vol. 241. 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Compatibilização de nanocompósitos de polipropileno e argila com polímeros biodegradáveis.

Oliveira Aguiar, V., Vuorinen, S. E., Grafova, I., Leskelä, M., Grafov, A. & Vieira Marques, M. D. F., Oct 2011, 11 Congresso Brasileiro de Polímeros. Associação Brasileira de Polímeros

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Evaluation of biodegradable polymers as compatibilizers for PP/PA6 blend

de Paula Amantes, B., Vieira Marques, M. D. F., Vuorinen, S., Grafova, I., Leskelä, M. & Grafov, A., Oct 2011, X Brazilian MRS Meeting 2011. Brasilia: Sociedade Brasileira de Pesquisa em Materiais

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Microimaging of curauá fibre, the emerging biopolymer for ceramic oxide film growth by Atomic Layer Deposition (ALD)

Grafova, I., Kemell, M. L., do Nascimento Lunz, J., Leskelä, M., Grafov, A. & Vieira Marques, M. D. F., Oct 2011, 11 Congresso Brasileiro de Polímeros. Campos do Jordao (SP): Associação Brasileira de Polímeros, Vol. 11 CBPol.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Preparação e caracterização de nanocompósitos de polypropylene com hydrotalcita modificada.

Grafov, A., Vieira Marques, M. D. F., Leskelä, M., Grafova, I., Oliveira Aguiar, V. & da Silva Araujo, R., Oct 2011, Congresso Brasileiro de Polímeros, CBPol. Associação Brasileira de Polímeros, Vol. 11 .

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition

Puurunen, R., Haara, A., Ritala, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2011, Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International . Beijing, p. 1887-1890 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2010

Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability

Rissanen, A., Tuppura, K., Laamanen, M., Puurunen, R., Färm, E., Ritala, M. & Leskelä, M., 2010, IEEE SENSORS 2010 Conference. p. 767-700 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2009

Atomic Layer Deposition of Germanium Antimony Telluride Thin Films

Ritala, M., Pore, V., Hatanpää, T., Heikkilä, M., Leskelä, M., Schrott, A., Raoux, S. & Rossnagel, S. M., 2009, Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig. p. 151-156 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical characterization of high-k based MIS capacitors using flat-band voltage transients

García, H., Dueñas, S., Castán, H., Gómez, A., Bailón, L., Hatanpää, T., Aarik, J., Aidla, A., Ritala, M. & Leskelä, M., 2009, Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, p. 223-226

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical characterization of ZrO2-based MIS structures with highly doped Si substrates

Gómez, A., Dueñas, S., Castán, H., García, H., Bailón, L., Kukli, K., Niinistö, J., Ritala, M. & Leskelä, M., 2009, Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, p. 227-230 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

LigniVal: Added Value to Lignin

Tamminen, T., Leskelä, M., Argyropoulos, D., Viikari, S., Kolppo, K., Wiiför, S., Poppius-Levlin, K., Fernyhough, A. & Lucia, L., 2009, Science & Technology of Biomasses: Advances and Challenges. p. 121-124

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors

Castán, H., Dueñas, S., García, H., Gómez, A., Bailón, L., Kukli, K., Niinistö, J., Ritala, M. & Leskelä, M., 2009, Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, p. 8-11 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2008

Catalytic Pre-treatment of Lignocellulosic Raw Materials

Lahtinen, P., Weymarn, N. V., Lankinen, E., Repo, T., Leskelä, M., Kallioinen, A., Uusitalo, J., Siika-aho, M. & Tamminen, T., 2008, 10th European Workshop on Lignocellulosics and Pulp. p. 16-19

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2007

Atomic layer deposition in nanotechnology applications

Leskelä, M., Kemell, M., Lautala, M., Pilvi, T., Pore, V., Santala, E. & Ritala, M., 2007, Abstracts of Papers: 234th ACS National Meeting. American Chemical Society, p. INOR-413

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Photocatalytic nanofibers and nanotubes made by atomic layer deposition.

Leskelä, M., Kemell, M., Pore, V., Santala, E. & Ritala, M., 2007, Abstracts of Papers, 233rd ACS National Meeting. p. INOR-028

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2006

Disordered Structure and Density of Gap States in High-Permittivity Thin Solid Films

Kukli, K., Dueñas, S., Castán, H., Garcia, H., Barbolla, J., Aarik, J., Aidla, A., Ritala, M. & Leskelä, M., 2006, Defects in High-k Gate Dielectric Stacks: Nano-Electronic Semiconductor Devices. Gusev, E. (ed.). Springer, p. 123-134 12 p. (NATO Science Series II. Mathematics, Physcis and Chemistry; vol. 220).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical Defects in Atomic Layer Deposited HfO2 Films on Silicon: Influence of Precursor Chemistries and Substrate Treatment

Dueñas, S., Castán, H., Garcia, H., Bailón, L., Kukli, K., Ritala, M. & Leskelä, M., 2006, NATO Science Series II : Mathematics, Physics and Chemistry . Vol. 220. p. 287-298

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Improved Process for the Detector Grade TlBr Single Crystals

Kozlov, V., Andersson, H., Leskelä, M. & Sipila, H., 2006, 2006 IEEE NUCLEAR SCIENCE SYMPOSIUM CONFERENCE RECORD. p. 3705-3707 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2005

A comparative study of atomic layer deposited advanced high-k dielectrics

Dueñas, S., Castán, H., García, H., Barbolla, J., Kukli, K., Aarik, J., Ritala, M. & Leskelä, M., 2005, 2005 Spanish Conference on Electron Devices. Institute of Electrical and Electronics Engineers, p. 29-32 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic Layer Deposition of Molybdenum Nitride Films

Alen, P., Ritala, M. & Leskelä, M., 2005, Advanced Metallization Conference 2004 (AMC 2004). Erb, D. (ed.). Materials Research Society, p. 763-768 6 p. (MRS Conference Proceedings Series; vol. 20).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic Layer Deposition of Noble Metals

Aaltonen, T., Ritala, M. & Leskelä, M., 2005, Proceedings of Advanced Metallization Conference 2004. Erb, D., Ramm, P., Masu, K. & Osaki, A. (eds.). Warrensdale, PA: Materials Research Society, p. 663-667 5 p. (MRS Conference Proceedings Series; vol. 20).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical characterization of atomic-layer-deposited hafnium silicate for alternative gate dielectric application

Dueñas, S., Castán, H., García, H., Barbolla, J., Kukli, K., Ritala, M. & Leskelä, M., 2005, 2005 Spanish Conference on Electron Devices: Proceedings. Institute of Electrical and Electronics Engineers, p. 45-48 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2004

Atomic Layer Deposition - an Alternative to the Deposition of Optical Coatings?

Ritala, M. & Leskelä, M., 2004, Technical Digest of 9th Optical Interference Coatings Meeting . Tucson , p. art no MB1 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic layer deposition of molybdenum nitride diffusion barriers for Cu interconnects

Alen, P., Ritala, M., Arstila, K., Keinonen, J., Sajavaara, T. & Leskela, M., 2004, Unknown host publication. Erb, D., Ramm, P., Masu, K. & Osaki, A. (eds.). p. 763-768 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Liquid Injection MOCVD and ALD Studies of "Single Source" Sr-Nb and Sr-Ta Precursors

Potter, R. J., Marshall, P. A., Roberts, J. L., Jones, A. C., Chalker, P. R., Vehkamäki, M., Ritala, M., Leskelä, M., Williams, P. A., Davies, H. O., Tobin, N. L. & Smith, L. M., 2004, Materials Research Society Symposium Proceedings . Vol. 784. p. 97 12 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

On the Interface Quality of MIS Structures Fabricated from Atomic Layer Deposition of HfO2, Ta2O5 and Nb2O5-Ta2O5-Nb2O5 Dielectric Thin Films

Dueñas, S., Castán, H., Garcia, H., Barbolla, J., Kukli, K., Ritala, M. & Leskelä, M., 2004, Materials Research Society Symposium Proceedings . p. 147 6 p. (Materials Research Society Online Proceedings Library; vol. 786).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2003

Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition

Hatanpää, T., Hänninen, T., Ihanus, J., Kansikas, J., Mutikainen, I., Vehkamäki, M., Ritala, M. & Leskelä, M., 2003, Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium. Allendorf, M. D., Maury, F. & Teyssandier, F. (eds.). Pennington, NJ : The Electrochemical Society , Vol. 2003-08. p. 516-522 7 p. (Electrochemical Society Proceedings ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic layer deposition of ruthenium from RuCp₂ and oxygen: film growth and reaction mechanism studies

Aaltonen, T., Rahtu, A., Ritala, M. & Leskelä, M., 2003, Electrochemical Society Proceedings . Vol. 2003-08. p. 946-953 (Electrcochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2002

Atomic-layer deposition of ZrO2 thin films using new alkoxide precursors

Jones, A. C., Williams, P. A., Roberts, J. L., Leedham, T. J., Davies, H. O., Matero, R., Ritala, M. & Leskelä, M., 2002, Materials Research Society symposia proceedings . New York, NY : North-Holland, p. 145-150 (Materials Research Society Proceedings; vol. 716).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic Layer Deposition Processes of HfO2 Thin Films and Layered HfO2-Al2O3-Nb2O5 Dielectrics

Kukli, K., Ritala, M. & Leskelä, M., 2002, Conference Papers : 4th International Conference on Materials for Microelectronics and Nanoengineering . p. 97-100

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

New approaches to the atomic layer deposition of tantalum nitride and titanium nitride thin films

Juppo, M., Alén, P., Ritala, M. & Leskelä, M., 2002, Conference Proceedings ULSI XVII . p. 633-639

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Transition Metal Complex Catalyse Phenol Oxidations in Search for New Bleaching Processes

Sipilä, A. J., Haikarainen, A., Repo, T. J., Leskelä, M. A., Korpi, T., Krause, O. & Sippola, V., 2002, 7th European Workshop of Lignicellulosics and Pulp, Proceedings Book. p. 367-368

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2000

Atomic layer deposition of high-k oxides

Ritala, M., Kukli, K., Vehkamäki, M., Hänninen, T., Hatanpää, T. T., Leskelä, M. & Räisänen, P. I., 2000, Proceedings - Electrochemical Society: CVD XV. The Electrochemical Society , Vol. 2000-13. p. 597-604 8 p. (Electrochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic layer deposition of metal oxide films by using metal alkoxides as an oxygen source

Räisänen, P., Kukli, K., Rahtu, A., Ritala, M. & Leskelä, M., 2000, Chemical vapor deposition XV . The Electrochemical Society , p. 623-628 (Electrochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Pulsing of H2 during the ALE growth of SrS:Cu

Ihanus, J., Ritala, M., Leskelä, M., Soininen, E., Lahonen, M., Kaloyeros, A., Harris, W., Barth, K., Topol, A., Park, W., Sajavaara, T. P. & Keinonen, J., 2000, Proceedings of The 10th International Workshop on Inorganic and Organic Electroluminescence (EL'00). Hamamatsu, Japan, p. 443-446 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1999

Growth of ZnO2/ZnO Thin Films by Successive Ionic Layer Adsorption and Reaction - SILAR - Technique

Lindroos, S., Leskelä, M. & Valkonen, M., 1999, Surface engineering: Proceedings of the Topical Symposium III - “Surface Engineering” of the Forum on New Materials of the 9th CIMTEC - World Ceramics Congress and Forum on New Materials. Faenza, p. 43-50 8 p. (Advances in Science and Technology; vol. 20).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1998

Solid Solution CdxZn1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic

Valkonen, M., Ritala, M., Lindroos, S. & Leskelä, M., 1998, Trends and New Applications of Thin Films: Proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF 98). Uetikon-Zuerich, Vol. 287-288. p. 367-370 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Solid Solution CdxZn1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic Layer Adsorption and Reaction Techniques

Valkonen, M. P., Ritala, M., Lindroos, S. & Leskelä, M., 1998, Materials science forum . Aademannsdorf : TransTech Publications , Vol. 287-288. p. 367-370

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1997

ALE growth of SrS1-xSex thin films by substituting surface sulfur with elemental selenium

Ihanus, J., Ritala, M. & Leskelä, M., 1997, Chemical vapor deposition : proceedings of the fourteenth international conference and EUROCVD-11 . Allendorf, M. D. & Bernard, C. (eds.). Pennington, NJ: The Electrochemical Society , Vol. 97-25 . p. 1423-1428 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Dielectric oxide nanolaminates deposited by atomic layer epitaxy

Kukli, K., Ritala, M. & Leskelä, M., 1997, Chemical vapor deposition : proceedings of the fourteenth international conference and EUROCVD-11 . Pennington : The Electrochemical Society , Vol. 97-25. p. 1137-1144

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1996

ALE Growth of Transparent Conductors

Ritala, M., Asikainen, T., Leskelä, M. & Skarp, J., 1996, Materials Research Society . Pittsburgh , Vol. 426. p. 513-518 (Materials Research Society Symposium Proceedings ; no. 426).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review