1970 …2020

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2020

Area-Selective Molecular Layer Deposition of Polyimide on Cu through Cu-Catalyzed Formation of a Crystalline Interchain Polyimide

Zhang, C., Vehkamäki, M., Pietikäinen, M., Leskelä, M. & Ritala, M., 23 Jun 2020, In : Chemistry of Materials. 32, 12, p. 5073-5083 11 p.

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Atomic Layer Deposition of PbS Thin Films at Low Temperatures: Chemistry of Materials

Popov, G., Bačić, G., Mattinen, M., Manner, T., Lindström, H., Seppänen, H., Suihkonen, S., Vehkamäki, M., Kemell, M., Jalkanen, P., Mizohata, K., Räisänen, J., Leskelä, M., Koivula, H. M., Barry, S. T. & Ritala, M., 16 Sep 2020, In : Chemistry of Materials.

Research output: Contribution to journalArticleScientificpeer-review

Controlling Atomic Layer Deposition of 2D Semiconductor SnS(2)by the Choice of Substrate

Mattinen, M., King, P. J., Bruener, P., Leskelä, M. & Ritala, M., 7 Aug 2020, In : Advanced Materials Interfaces . 10 p., 2001046.

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High temperature x-ray scattering studies of atomic layer deposited IrO2

Heikkilä, M. J., Hämäläinen, J., Puukilainen, E., Leskelä, M. & Ritala, M., 1 Apr 2020, In : Journal of Applied Crystallography. 53, p. 369-380 12 p.

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Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition

Kukli, K., Kemell, M., Castan, H., Duenas, S., Link, J., Stern, R., Heikkilä, M. J., Jogiaas, T., Kozlova, J., Rahn, M., Mizohata, K., Ritala, M. & Leskelä, M., Jul 2020, In : Journal of vacuum science & technology : an official journal of the American Vacuum Society. 38, 4, 11 p.

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Photocatalytic and Gas Sensitive Multiwalled Carbon Nanotube/TiO2-ZnO and ZnO-TiO2 Composites Prepared by Atomic Layer Deposition

Bakos, L. P., Justh, N., da Costa, U. C. M. D. S. B., Laszlo, K., Labar, J. L., Igricz, T., Varga-Josepovits, K., Pasierb, P., Farm, E., Ritala, M., Leskelä, M. & Szilagyi, I. M., Feb 2020, In : Nanomaterials. 10, 2, 14 p., 252.

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Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane

Kukli, K., Kemell, M., Heikkilä, M. J., Castan, H., Duenas, S., Mizohata, K., Ritala, M. & Leskelä, M., 8 May 2020, In : Nanotechnology. 31, 19, 10 p., 195713.

Research output: Contribution to journalArticleScientificpeer-review

Synthesis, molecular docking studies, and larvicidal activity evaluation of new fluorinated neonicotinoids against Anopheles darlingi larvae

da Silva Mesquita, R., Kyrylchuk, A., Grafova, I., Kliukovskyi, D., Bezdudnyy, A., Rozhenko, A., Tadei, W. P., Leskelä, M. & Grafov, A., 5 Feb 2020, In : PLoS One. 15, 2, p. 1-20 20 p., 0227811.

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Van der Waals epitaxy of continuous thin films of 2D materials using atomic layer deposition in low temperature and low vacuum conditions

Mattinen, M., King, P. J., Popov, G., Hämäläinen, J., Heikkilä, M. J., Leskelä, M. & Ritala, M., Jan 2020, In : 2D Materials. 7, 1, 8 p., 011003.

Research output: Contribution to journalArticleScientificpeer-review

2019
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Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronics

Mattinen, M., Popov, G., Vehkamäki, M., King, P. J., Mizohata, K., Jalkanen, P., Räisänen, J., Leskelä, M. & Ritala, M., 13 Aug 2019, In : Chemistry of Materials. 31, 15, p. 5713-5724 12 p.

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Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films

Väyrynen, K., Hatanpää, T., Mattinen, M., Mizohata, K., Meinander, K., Räisänen, J., Link, J., Stern, R., Ritala, M. & Leskela, M., 8 Feb 2019, In : Advanced Materials Interfaces . 6, 3, 7 p., 1801291.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl2(TMPDA) and Tert‐Butylhydrazine as Precursors

Väyrynen, K., Hatanpää, T., Mattinen, M., Heikkilä, M. J., Mizohata, K., Räisänen, J., Link, J., Stern, R., Ritala, M. & Leskelä, M., Jun 2019, In : Physica Status Solidi. A: Applications and Materials Science. 216, 11, p. 1900058 9 p., 1900058.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of PbI₂ Thin Films

Popov, G., Mattinen, M. J., Hatanpää, T., Vehkamäki, M., Kemell, M., Mizohata, K., Räisänen, J., Ritala, M. & Leskelä, M., 12 Feb 2019, In : Chemistry of Materials. 31, 3, p. 1101–1109 9 p.

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Atomic Layer Deposition of Photoconductive Cu2O Thin Films

Iivonen, T., Heikkilä, M. J., Popov, G., Nieminen, H-E., Kaipio, M., Kemell, M., Mattinen, M., Meinander, K., Mizohata, K., Räisänen, J., Ritala, M. & Leskelä, M., Jun 2019, In : ACS Omega. 4, 6, p. 11205-11214 10 p.

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Charge carrier dynamics in tantalum oxide overlayered and tantalum doped hematite photoanodes

Ruoko, T-P., Hiltunen, A., Iivonen, T., Ulkuniemi, R., Lahtonen, K., Ali-Löytty, H., Mizohata, K., Valden, M., Leskelä, M. & Tkachenko, N. V., 21 Feb 2019, In : Journal of Materials Chemistry. A. 7, 7, p. 3206-3215 10 p.

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Controlling the refractive index and third-order nonlinearity of polyimide/Ta2O5 nanolaminates for optical applications

Färm, E., Mehravar, S., Kieu, K., Peyghambarian, N., Ritala, M., Leskelä, M. & Kemell, M., 11 Nov 2019, In : Journal of vacuum science & technology : an official journal of the American Vacuum Society. 37, 6, 5 p., 060908.

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How insignificant modifications of photocatalysts can significantly change their photocatalytic activity

Trochowski, M., Kobielusz, M., Mroz, K., Surowka, M. K., Hämäläinen, J., Iivonen, T., Leskelä, M. & Macyk, W., 21 Nov 2019, In : Journal of Materials Chemistry. A. 7, 43, p. 25142-25154 13 p.

Research output: Contribution to journalArticleScientificpeer-review

Nickel Germanide Thin Films by Atomic Layer Deposition

Väyrynen, K., Vihervaara, A., Hatanpää, T., Mattinen, M., Heikkilä, M. J., Mizohata, K., Raisanen, J., Ritala, M. & Leskelä, M., 23 Jul 2019, In : Chemistry of Materials. 31, 14, p. 5314-5319 6 p.

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Reversely toposelective vapor deposition at normal pressure and temperature by capillary condensation

Lovikka, V. A., Kemell, M., Vehkamäki, M. & Leskelä, M., 1 Jul 2019, In : Materials Horizons. 6, 6, p. 1230-1237 8 p.

Research output: Contribution to journalArticleScientificpeer-review

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Titania Nanotubes/Hydroxyapatite Nanocomposites Produced with the Use of the Atomic Layer Deposition Technique: Estimation of Bioactivity and Nanomechanical Properties

Radtke, A., Ehlert, M., Jcdrzejewski, T., Sadowska, B., Wieckowska-Szakiel, M., Holopainen, J., Ritala, M., Leskelä, M., Bartmanski, M., Szkodo, M. & Piszczek, P., Jan 2019, In : Nanomaterials. 9, 1, 21 p., 123.

Research output: Contribution to journalArticleScientificpeer-review

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2018

Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films

Kukli, K., Kemell, M., Castan, H., Duenas, S., Seemen, H., Rähn, M., Link, J., Stern, R., Heikkilä, M. J., Ritala, M. & Leskelä, M., 2018, In : ECS Journal of Solid State Science and Technology. 7, 5, p. P287-P294 8 p.

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Atomic Layer Deposition and Properties of HfO2-Al2O3 Nanolaminates

Kukli, K., Kemell, M., Castan, H., Duenas, S., Seemen, H., Rähn, M., Link, J., Stern, R., Ritala, M. & Leskelä, M., 6 Sep 2018, In : ECS Journal of Solid State Science and Technology. 7, 9, p. P501-P508 8 p.

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Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing

Mattinen, M., King, P. J., Khriachtchev, L., Heikkilä, M. J., Fleming, B., Rushworth, S., Mizohata, K., Meinander, K., Räisänen, J., Ritala, M. & Leskelä, M., Sep 2018, In : Materials today chemistry. 9, p. 17-27 11 p.

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Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties

Seppälä, S., Niinistö, J., Mattinen, M., Mizohata, K., Räisänen, J., Noh, W., Ritala, M. & Leskelä, M., 30 Aug 2018, In : Thin Solid Films. 660, p. 199-206 8 p.

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Atomic Layer Deposition of Molybdenum and Tungsten Oxide Thin Films Using Heteroleptic Imido-Amidinato Precursors: Process Development, Film Characterization, and Gas Sensing Properties

Mattinen, M., Wree, J-L., Stegmann, N., Ciftyurek, E., El Achhab, M., King, P. J., Mizohata, K., Räisänen, J., Schierbaum, K. D., Devi, A., Ritala, M. & Leskelä, M., 11 Dec 2018, In : Chemistry of Materials. 30, 23, p. 8690-8701 12 p.

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Atomic Layer Deposition of Rhenium Disulfide

Hämäläinen, J., Mattinen, M., Mizohata, K., Meinander, K., Vehkamäki, M., Räisänen, J., Ritala, M. & Leskelä, M., 13 Jun 2018, In : Advanced Materials. 30, 24, p. 1703622 6 p., 1703622.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone

Kukli, K., Kemell, M., Mizohata, K., Vehkamäki, M., Kalam, K., Castan, H., Duenas, S., Link, J., Stern, R., Ritala, M. & Leskelä, M., 2018, In : ECS Journal of Solid State Science and Technology. 7, 2, p. P1-P8 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Design aspects of all atomic layer deposited TiO2–Fe2O3 scaffold-absorber photoanodes for water splitting

Hiltunen, A., Ruoko, T-P., Iivonen, T., Lahtonen, K., Ali-Löytty, H., Sarlin, E., Valden, M., Leskelä, M. & Tkachenko, N., 1 Sep 2018, In : Sustainable Energy & Fuels. 2, 9, p. 2124-2130 7 p.

Research output: Contribution to journalArticleScientificpeer-review

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Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Films

Mattinen, M., King, P. J., Khriachtchev, L., Meinander, K., Gibbon, J. T., Dhanak, V. R., Räisänen, J., Ritala, M. & Leskelä, M., 24 May 2018, In : Small. 14, 21, 8 p., 1800547.

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Metal oxide multilayer hard mask system for 3D nanofabrication

Han, Z., Vehkamäki, M., Salmi, E., Leskelä, M. & Ritala, M., 2 Feb 2018, In : Nanotechnology. 29, 5, 8 p., 055301.

Research output: Contribution to journalArticleScientificpeer-review

Patterned films by atomic layer deposition using Parafilm as a mask

Zhang, C., Kalliomäki, J., Leskelä, M. & Ritala, M., Jan 2018, In : Journal of vacuum science & technology : an official journal of the American Vacuum Society. 36, 1, 5 p., ARTN 01B102.

Research output: Contribution to journalArticleScientificpeer-review

Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition

Hämäläinen, J., Mizohata, K., Meinander, K., Mattinen, M., Vehkamäki, M., Räisänen, J., Ritala, M. & Leskelä, M., 26 Oct 2018, In : Angewandte Chemie (International Edition). 57, 44, p. 14538-14542 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Towards space-grade 3D-printed, ALD-coated small satellite propulsion components for fluidics

Kestilä, A., Nordling, K. G. M., Miikkulainen, V., Kaipio, M., Tikka, T., Salmi, M., Auer, A., Leskelä, M. & Ritala, M., Aug 2018, In : Additive manufacturing. 22, p. 31-37 7 p.

Research output: Contribution to journalArticleScientificpeer-review

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Atomic layer deposition and properties of mixed Ta2O5 and ZrO2 films

Kukli, K., Kemell, M., Vehkamäki, M., Heikkilä, M. J., Mizohata, K., Kalam, K., Ritala, M., Leskelä, M., Kundrata, I. & Frohlich, K., Feb 2017, In : AIP Advances. 7, 2, 15 p., 025001.

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Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth

Mattinen, M., Hatanpaa, T., Sarnet, T., Mizohata, K., Meinander, K., King, P. J., Khriachtchev, L., Räisänen, J., Ritala, M. & Leskelä, M., 22 Sep 2017, In : Advanced Materials Interfaces . 4, 18, 11 p., 1700123.

Research output: Contribution to journalArticleScientificpeer-review

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Low-Temperature Atomic Layer Deposition of Cobalt Oxide as an Effective Catalyst for Photoelectrochemical Water-Splitting Devices

Kim, J., Iivonen, T., Hämäläinen, J., Kemell, M., Meinander, K., Mizohata, K., Wang, L., Räisänen, J., Beranek, R., Leskelä, M. & Devi, A., 25 Jul 2017, In : Chemistry of Materials. 29, 14, p. 5796-5805 10 p.

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Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)(2) and Tertiary Butyl Hydrazine

Väyrynen, K., Mizohata, K., Räisänen, J., Peeters, D., Devi, A., Ritala, M. & Leskelä, M., 8 Aug 2017, In : Chemistry of Materials. 29, 15, p. 6502-6510 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings

Radtke, A., Jędrzejewski, T., Kozak, W., Sadowska, B., Więckowska-Szakiel, M., Talik, E., Mäkelä, M. I., Leskelä, M. A. & Piszczek, P., 24 Jul 2017, In : Nanomaterials. 7, 7, 19 p., 193.

Research output: Contribution to journalArticleScientificpeer-review

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Studies on Thermal Atomic Layer Deposition of Silver Thin Films

Mäkelä, M., Hatanpää, T., Mizohata, K., Meinander, K., Niinistö, J., Räisänen, J., Ritala, M. & Leskelä, M., 14 Mar 2017, In : Chemistry of Materials. 29, 5, p. 2040-2045 6 p.

Research output: Contribution to journalArticleScientificpeer-review