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Marko Vehkamäki

  • PL 55 (A. I. Virtasen aukio 1)

    00014

    Finland

19982020

Research output per year

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Publications

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Conference contribution
2015

Resistless fabrication of embedded nanochannels by FIB patterning, wet etching and atomic layer deposition

Han, Z., Vehkamäki, M. J., Leskelä, M. & Ritala, M. K., 2015, Proceedings of the 15th IEEE International Conference on Nanotechnology. IEEE, p. 1008-1011 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Open Access
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2003

Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition

Hatanpää, T., Hänninen, T., Ihanus, J., Kansikas, J., Mutikainen, I., Vehkamäki, M., Ritala, M. & Leskelä, M., 2003, Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium. Allendorf, M. D., Maury, F. & Teyssandier, F. (eds.). Pennington, NJ : The Electrochemical Society , Vol. 2003-08. p. 516-522 7 p. (Electrochemical Society Proceedings ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2000

Atomic layer deposition of high-k oxides

Ritala, M., Kukli, K., Vehkamäki, M., Hänninen, T., Hatanpää, T. T., Leskelä, M. & Räisänen, P. I., 2000, Proceedings - Electrochemical Society: CVD XV. The Electrochemical Society , Vol. 2000-13. p. 597-604 8 p. (Electrochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review