Marko Vehkamäki

Research output

Research output per year 1998 2007 2014 2015 2016 2017 2018 2019 2022 2023 2025

• 70 Article
• 4 Conference contribution
• 3 Patent
• 2 Conference article
• 1 More
  • 1 Poster

Research output per year

Research output per year

Search results

• 2025

  Atomic Layer Etching of Tantalum with NbCl₅ and O₂

  Ojala, J., Pykalainen, P., Chundak, M., Vihervaara, A., Vehkamaki, M. & Ritala, M., 14 May 2025, In: Chemistry of Materials. 37, 10, p. 3822-3829 8 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File
• 2024

  3D-printed sensor electric circuits using atomic layer deposition

  Kestilä, A., Vehkamäki, M., Nyman, L., Salmi, M., Lohilahti, J., Hatanpää, T., Lafont, U. & Ritala, M., 1 May 2024, In: Sensors and Actuators A: Physical. 370, 7 p., 115260.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Selective gas phase pulsed etching of oxides with NbCl₅

  Ojala, J., Vehkamaeki, M., Chundak, M., Vihervaara, A., Mizohata, K. & Ritala, M., 9 Dec 2024, In: Journal of Materials Chemistry C. 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File
• 2023

  Atomic Layer Deposition of Boron-Doped Al2O3 Dielectric Films

  Li, X., Vehkamäki, M., Chundak, M., Mizohata, K., Vihervaara, A., Leskelä, M., Putkonen, M. & Ritala, M., Jun 2023, In: Advanced Materials Interfaces . 10, 18, 8 p., 2300173.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Inherent Area-Selective Atomic Layer Deposition of ZnS

  Zhang, C., Vehkamäki, M., Leskelä, M. & Ritala, M., 15 May 2023, In: Dalton Transactions. 52, p. 9622-9630 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes

  Nieminen, H.-E., Chundak, M., Heikkila, M. J., Karkkainen, P. R., Vehkamaki, M., Putkonen, M. & Ritala, M., Mar 2023, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 41, 2, 11 p., 022401.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Molecular layer deposition of hybrid silphenylene-based dielectric film

  Li, X., Vehkamäki, M., Chundak, M., Mizohata, K., Vihervaara, A., Putkonen, M., Leskelä, M. & Ritala, M., 11 Oct 2023, In: Advanced composites and hybrid materials. 6, 5, 11 p., 183.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization

  Ghafourisaleh, S., Vehkamäki, M., Vihervaara, A., Zhang, C., Heikkilä, M., Leskelä, M., Putkonen, M. & Ritala, M., 6 Mar 2023, In: Advanced Materials Interfaces . 10, 7, 10 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• 2022

  Atomic Layer Deposition of CsI and CsPbI₃

  Weiß, A., Popov, G., Atosuo, E. K., Vihervaara, A., Jalkanen, P., Vehkamäki, M., Leskelä, M., Ritala, M. & Kemell, M., 12 Jul 2022, In: Chemistry of Materials. 34, 13, p. 6087-6097 11 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Atomic layer deposition of GdF₃ thin films

  Atosuo, E., Mizohata, K., Mattinen, M., Mäntymäki, M., Vehkamäki, M., Leskelä, M. & Ritala, M., Mar 2022, In: Journal of Vacuum Science Technology A: Vacuum, Surfaces, and Films. 40, 2, 8 p., 022402.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures

  Ghafourisaleh, S., Hatanpaa, T., Vihervaara, A., Mizohata, K., Vehkamaki, M., Leskela, M., Putkonen, M. & Ritala, M., May 2022, In: Advanced Materials Interfaces . 9, 15, 12 p., 2200370.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Toposelective vapor deposition of hybrid and inorganic materials inside nanocavities by polymeric templating and vapor phase infiltration

  Lovikka, V. A., Airola, K. P., McGuinness, E., Zhang, C., Vehkamäki, M., Kemell, M., Losego, M., Ritala, M. & Leskelä, M., 27 Sept 2022, In: Nanoscale Advances. 4, 19, p. 4102-4113 12 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• 2021

  Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

  Li, X., Vehkamaki, M., Heikkila, M., Mattinen, M., Putkonen, M., Leskela, M. & Ritala, M., Mar 2021, In: Coatings. 11, 3, 13 p., 355.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Highly Material Selective and Self-Aligned Photo-assisted Atomic Layer Deposition of Copper on Oxide Materials

  Miikkulainen, V., Vehkamäki, M., Mizohata, K., Hatanpää, T. & Ritala, M., 9 Jun 2021, In: Advanced Materials Interfaces . 8, 11, 9 p., 2100014.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Novel electroblowing synthesis of tin dioxide and composite tin dioxide/silicon dioxide submicron fibers for cobalt(II) uptake

  Paajanen, J., Weintraub, S., Lönnrot, S., Heikkilä, M., Vehkamäki, M., Kemell, M., Hatanpää, T., Ritala, M. & Koivula, R., 4 May 2021, In: RSC Advances. 11, 25, p. 15245-15257 13 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• 2020

  Area-Selective Molecular Layer Deposition of Polyimide on Cu through Cu-Catalyzed Formation of a Crystalline Interchain Polyimide

  Zhang, C., Vehkamäki, M., Pietikäinen, M., Leskelä, M. & Ritala, M., 23 Jun 2020, In: Chemistry of Materials. 32, 12, p. 5073-5083 11 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Atomic Layer Deposition of PbS Thin Films at Low Temperatures

  Popov, G., Bačić, G., Mattinen, M., Manner, T., Lindström, H., Seppänen, H., Suihkonen, S., Vehkamäki, M., Kemell, M., Jalkanen, P., Mizohata, K., Räisänen, J., Leskelä, M., Koivula, H. M., Barry, S. T. & Ritala, M., 13 Oct 2020, In: Chemistry of Materials. 32, 19, p. 8216–8228 13 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Hydrogen release from liquid organic hydrogen carriers catalysed by platinum on rutile-anatase structured titania

  Aakko-Saksa, P. T., Vehkamäki, M., Kemell, M., Keskiväli, L., Simell, P., Reinikainen, M., Tapper, U. & Repo, T., 7 Feb 2020, In: Chemical Communications. 56, 11, p. 1657-1660 4 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• 2019

  Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronics

  Mattinen, M., Popov, G., Vehkamäki, M., King, P. J., Mizohata, K., Jalkanen, P., Räisänen, J., Leskelä, M. & Ritala, M., 13 Aug 2019, In: Chemistry of Materials. 31, 15, p. 5713-5724 12 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Atomic Layer Deposition of PbI₂ Thin Films

  Popov, G., Mattinen, M. J., Hatanpää, T., Vehkamäki, M., Kemell, M., Mizohata, K., Räisänen, J., Ritala, M. & Leskelä, M., 12 Feb 2019, In: Chemistry of Materials. 31, 3, p. 1101–1109 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Comparative study on the use of novel heteroleptic cyclopentadienyl-based zirconium precursors with H2O and O-3 for atomic layer deposition of ZrO2

  Seppälä, S., Vehkamäki, M., Mizohata, K., Noh, W., Räisänen, J., Ritala, M. & Leskelä, M., Mar 2019, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 37, 2, 8 p., 020912.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File

• Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursors

  Miikkulainen, V., Vayrynen, K., Mizohata, K., Räisänen, J., Vehkamäki, M. & Ritala, M., Nov 2019, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 37, 6, 9 p., 060911.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Reversely toposelective vapor deposition at normal pressure and temperature by capillary condensation

  Lovikka, V. A., Kemell, M., Vehkamäki, M. & Leskelä, M., 1 Jul 2019, In: Materials Horizons. 6, 6, p. 1230-1237 8 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

• Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia

  Mäntymäki, M., Atosuo, E., Heikkilä, M. J., Vehkamäki, M., Mattinen, M., Mizohata, K., Räisänen, J., Ritala, M. & Leskelä, M., Mar 2019, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 37, 2, 8 p., 020929.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Toward epitaxial ternary oxide multilayer device stacks by atomic layer deposition

  King, P. J., Vehkamäki, M., Mattinen, M., Heikkilä, M. J., Mizohata, K., Noh, W., Leskelä, M. & Ritala, M., Mar 2019, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 37, 2, 4 p., 020602.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• 2018

  Atomic Layer Deposition of Rhenium Disulfide

  Hämäläinen, J., Mattinen, M., Mizohata, K., Meinander, K., Vehkamäki, M., Räisänen, J., Ritala, M. & Leskelä, M., 13 Jun 2018, In: Advanced Materials. 30, 24, p. 1703622 6 p., 1703622.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone

  Kukli, K., Kemell, M., Mizohata, K., Vehkamäki, M., Kalam, K., Castan, H., Duenas, S., Link, J., Stern, R., Ritala, M. & Leskelä, M., 2018, In: ECS Journal of Solid State Science and Technology. 7, 2, p. P1-P8 8 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Metal oxide multilayer hard mask system for 3D nanofabrication

  Han, Z., Vehkamäki, M., Salmi, E., Leskelä, M. & Ritala, M., 2 Feb 2018, In: Nanotechnology. 29, 5, 8 p., 055301.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition

  Hämäläinen, J., Mizohata, K., Meinander, K., Mattinen, M., Vehkamäki, M., Räisänen, J., Ritala, M. & Leskelä, M., 26 Oct 2018, In: Angewandte Chemie (International Edition). 57, 44, p. 14538-14542 5 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• 2017

  (Invited) Photo-Assisted ALD: Process Development and Application Perspectives

  Miikkulainen, V., Väyrynen, K., Kilpi, V., Han, Z., Vehkamäki, M., Mizohata, K., Räisänen, J. & Ritala, M., 2017, In: ECS transactions. 80, 3, p. 49-60 12 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• As2S3 thin films deposited by atomic layer deposition

  Färm, E., Heikkilä, M. J., Vehkamäki, M., Mizohata, K., Ritala, M., Leskelä, M. & Kemell, M., Jan 2017, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 35, 1, 7 p., 01B114.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Atomic layer deposition and properties of mixed Ta2O5 and ZrO2 films

  Kukli, K., Kemell, M., Vehkamäki, M., Heikkilä, M. J., Mizohata, K., Kalam, K., Ritala, M., Leskelä, M., Kundrata, I. & Frohlich, K., Feb 2017, In: AIP Advances. 7, 2, 15 p., 025001.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• Isosorbide synthesis from cellulose with an efficient and recyclable ruthenium catalyst

  Keskiväli, J., Rautiainen, S., Heikkilä, M., Myllymäki, T. T. T., Karjalainen, J.-P., Lagerblom, K., Kemell, M., Vehkamäki, M., Meinander, K. & Repo, T., 7 Oct 2017, In: Green Chemistry. 19, 19, p. 4563-4570 8 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Surface Modification of Acetaminophen Particles by Atomic Layer Deposition

  Kääriäinen, T. O., Kemell, M. L., Vehkamäki, M. J., Kääriäinen, M.-L., Correia, A., Almeida Santos, H., Marques dos Santos Bimbo, L. M., Hirvonen, J. T., Hoppu, P., George, S. M., Cameron, D. C., Ritala, M. K. & Leskelä, M. A., 15 Jun 2017, In: International Journal of Pharmaceutics. 525, 1, p. 160–174 15 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• 2016

  Atomic Layer Deposition of Iridium Thin Films Using Sequential Oxygen and Hydrogen Pulses

  Mattinen, M., Hämäläinen, J., Vehkamäki, M., Heikkilä, M. J., Mizohata, K., Jalkanen, P., Räisänen, J., Ritala, M. & Leskelä, M., 21 Jul 2016, In: Journal of Physical Chemistry C. 120, 28, p. 15235-15243 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Bismuth iron oxide thin films using atomic layer deposition of alternating bismuth oxide and iron oxide layers

  Puttaswamy, M., Vehkamäki, M., Kukli, K., Dimri, M. C., Kemell, M., Hatanpää, T., Heikkilä, M. J., Mizohata, K., Stern, R., Ritala, M. & Leskelä, M., 29 Jul 2016, In: Thin Solid Films. 611, p. 78-87 10 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Electric and Magnetic Properties of ALD-Grown BiFeO3 Films

  Marchand, B., Jalkanen, P., Tuboltsev, V., Vehkamäki, M., Puttaswamy, M., Kemell, M., Mizohata, K., Hatanpää, T., Savin, A., Räisänen, J., Ritala, M. & Leskelä, M., 7 Apr 2016, In: Journal of Physical Chemistry C. 120, 13, p. 7313-7322 10 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Microwave-assisted base-free oxidation of glucose on gold nanoparticle catalysts

  Rautiainen, S., Lehtinen, P., Vehkamäki, M., Niemelä, K., Kemell, M., Heikkilä, M. & Repo, T., 10 Jan 2016, In: Catalysis Communications. 74, p. 115-118 4 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Oxidation of Vanillin with Supported Gold Nanoparticles

  Rautiainen, S., Chen, J., Vehkamäki, M. & Repo, T., Aug 2016, In: Topics in Catalysis. 59, 13-14, p. 1138-1142 5 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Soot-doped natural snow and its albedo - results from field experiments

  Svensson, J., Virkkula, A., Meinander, O., Kivekäs, N., Hannula, H.-R., Järvinen, O., Peltoniemi, J. I., Gritsevich, M., Heikkila, A., Kontu, A., Neitola, K., Brus, D., Dagsson-Waldhauserova, P., Anttila, K., Vehkamäki, M., Hienola, A., De Leeuw, G. & Lihavainen, H., 2016, In: Boreal Environment Research. 21, 5-6, p. 481-503 23 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

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• 2015

  (Et3Si)(2)Se as a precursor for atomic layer deposition: growth analysis of thermoelectric Bi2Se3

  Sarnet, T., Hatanpaa, T., Vehkamaki, M., Flyktman, T., Ahopelto, J., Mizohata, K., Ritala, M. & Leskela, M., 2015, In: Journal of Materials Chemistry. C. 3, 18, p. 4820-4828 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Atomic Layer Deposition and Characterization of Bi2Te3 Thin Films

  Sarnet, T., Hatanpaa, T., Puukilainen, E., Mattinen, M., Vehkamaki, M., Mizohata, K., Ritala, M. & Leskela, M., 19 Mar 2015, In: Journal of Physical Chemistry A. 119, 11, p. 2298-2306 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Atomic layer deposition of zirconium dioxide from zirconium tetrachloride and ozone

  Kukli, K., Kemell, M., Köykkä, J., Mizohata, K., Vehkamaki, M., Ritala, M. & Leskela, M., 31 Aug 2015, In: Thin Solid Films. 589, p. 597-604 8 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Impedance spectroscopy study of the unipolar and bipolar resistive switching states of atomic layer deposited polycrystalline ZrO2 thin films

  Kärkkänen, I., Shkabko, A., Heikkilä, M., Vehkamäki, M., Niinistö, J., Aslam, N., Meuffels, P., Ritala, M., Leskelä, M., Waser, R. & Hoffmann-Eifert, S., Apr 2015, In: Physica Status Solidi. A: Applications and Materials Science. 212, 4, p. 751-766 16 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication method

  Han, Z., Vehkamaki, M., Mattinen, M., Salmi, E., Mizohata, K., Leskela, M. & Ritala, M., 3 Jul 2015, In: Nanotechnology. 26, 26, 10 p., 265304.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Selective oxidation of uronic acids into aldaric acids over gold catalyst

  Rautiainen, S., Lehtinen, P., Chen, J., Vehkamaki, M., Niemela, K., Leskela, M. & Repo, T., 2015, In: RSC Advances. 5, 25, p. 19502-19507 6 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Studies on Atomic Layer Deposition of IRMOF-8 Thin Films

  Salmi, L., Heikkilä, M., Vehkamäki, M., Puukilainen, E., Sajavaara, T. P. & Ritala, M., Jan 2015, In: Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films. 33, 1, p. 01A121-1 - 01A121-8 8 p., ARTN 01A121.

  Research output: Contribution to journal › Article › Scientific › peer-review
• 2014

  Combining focused ion beam and atomic layer deposition in nanostructure fabrication

  Han, Z., Vehkamäki, M., Leskelä, M. & Ritala, M., 21 Mar 2014, In: Nanotechnology. 25, 11, p. 115302 5 p., 115302.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Evaluating optimal combination of clodronate and bioactive glass for dental application

  Rosenqvist, K., Airaksinen, S., Vehkamäki, M. & Juppo, A. M., 1 Jul 2014, In: International Journal of Pharmaceutics. 468, 1-2, p. 112-120 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Magnetic Properties of Polycrystalline Bismuth Ferrite Thin Films Grown by Atomic Layer Deposition

  Jalkanen, P., Tuboltsev, V., Marchand, B., Savin, A., Puttaswamy, M., Vehkamäki, M., Mizohata, K., Kemell, M. L., Hatanpää, T. T., Rogozin, V., Räisänen, J., Ritala, M. & Leskelä, M., 18 Dec 2014, In: Journal of Physical Chemistry Letters. 5, 24, p. 4319-4323 5 p.

  Research output: Contribution to journal › Article › Scientific › peer-review