Matti Putkonen — University of Helsinki

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Phone+358405203099, +358294150199
Emailmatti.putkonenhelsinkifi

PL 55 (A. I. Virtasen aukio 1)
00014
Finland
Finland

Research activity per year

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Fields of Science

116 Chemical sciences
atomic layer deposition (ALD)

81 Article
30 Commissioned report
3 Chapter
3 Conference contribution

Atomic Layer Deposition of Boron-Doped Al2O3 Dielectric Films
Li, X., Vehkamäki, M., Chundak, M., Mizohata, K., Vihervaara, A., Leskelä, M., Putkonen, M. & Ritala, M., Jun 2023, In: Advanced Materials Interfaces . 10, 18, 8 p., 2300173.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes
Nieminen, H-E., Chundak, M., Heikkila, M. J., Karkkainen, P. R., Vehkamaki, M., Putkonen, M. & Ritala, M., Mar 2023, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 41, 2, 11 p., 022401.
Research output: Contribution to journal › Article › Scientific › peer-review
Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization
Ghafourisaleh, S., Vehkamäki, M., Vihervaara, A., Zhang, C., Heikkilä, M., Leskelä, M., Putkonen, M. & Ritala, M., 6 Mar 2023, In: Advanced Materials Interfaces . 10, 7, 10 p.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
Regularly arranged ZnO/TiO2, HfO2, and ZrO2 core/shell hybrid nanostructures - towards selection of the optimal shell material for efficient ZnO-based UV light emitters
Gierałtowska, S., Zaleszczyk, W., Putkonen, M., Zasada, D., Korona, K. P. & Norek, M., 23 Jul 2023, (Accepted/In press) In: Ceramics International. 12 p.
Research output: Contribution to journal › Article › Scientific › peer-review
Ambient pressure x-ray photoelectron spectroscopy setup for synchrotron-based in situ and operando atomic layer deposition research
Kokkonen, E., Kaipio, M., Nieminen, H. -E., Rehman, F., Miikkulainen, V., Putkonen, M., Ritala, M., Huotari, S., Schnadt, J. & Urpelainen, S., 1 Jan 2022, In: Review of Scientific Instruments. 93, 1, 13 p., 013905.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File

1 Not started

JAES-1/2024-12/2027-Putkonen
Putkonen, M.
Jane ja Aatos Erkon säätiö
01/01/2024 → 31/12/2027
Project: Foundations (Private Foundations, Non-Profit Foundations, Charitable Trusts)