Research output per year
Research output per year
Personal profile
Fields of Science
- 116 Chemical sciences
International and National Collaboration
Publications and projects within past five years.
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In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes
Nieminen, H-E., Chundak, M., Heikkila, M. J., Karkkainen, P. R., Vehkamaki, M., Putkonen, M. & Ritala, M., Mar 2023, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 41, 2, 11 p., 022401.Research output: Contribution to journal › Article › Scientific › peer-review
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Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization
Ghafourisaleh, S., Vehkamäki, M., Vihervaara, A., Zhang, C., Heikkilä, M., Leskelä, M., Putkonen, M. & Ritala, M., 6 Mar 2023, In: Advanced Materials Interfaces . 10, 7, 10 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Bulk synthesis of stoichiometric/meteoritic troilite (FeS) by high-temperature pyrite decomposition and pyrrhotite melting
Moreau, J-G., Joeleht, A., Aruvali, J., Heikkila, M. J., Stojic, A. N., Thomberg, T., Plado, J. & Hietala, S., Mar 2022, In: Meteoritics and Planetary Science. 57, 3, p. 588-602 15 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Electroblown titanium dioxide and titanium dioxide/silicon dioxide submicron fibers with and without titania nanorod layer for strontium(II) uptake
Paajanen, J., Pettilä, L. O., Lönnrot, S., Heikkilä, M., Hatanpää, T., Ritala, M. & Koivula, R., 10 Dec 2022, In: Chemical Engineering Journal Advances. 13, p. 1-12 12 p., 100434.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Laboratory-scale x-ray absorption spectroscopy of 3d transition metals in inorganic thin films
Kallio, A-J., Weiss, A., Bes, R., Heikkilä, M., Kemell, M., Ritala, M. & Huotari, S., 13 Dec 2022, In: Dalton Transactions. 51, 48, p. 18593-18602 10 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile
Activities
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High temperature XRD and XRR studies on atomic layer deposited niobium oxide - silicon oxide nanolaminates
Mikko Heikkilä (Speaker)
27 Jun 2019Activity: Talk or presentation types › Oral presentation
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Materials Characterization by the Combined Analysis
Mikko Heikkilä (Attendee)
26 Nov 2018 → 30 Nov 2018Activity: Participating in or organising an event types › Organisation and participation in conferences, workshops, courses, seminars
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Properties of ALD grown Al2O3-TiO2 laminates investigated by high temperature XRD/XRR and in situ wafer curvature measurements
Mikko Heikkilä (Speaker)
17 Sep 2018 → 20 Sep 2018Activity: Talk or presentation types › Oral presentation
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2017 E-MRS Fall Meeting and Exhibit
Mikko Heikkilä (Attendee)
18 Sep 2017 → 21 Sep 2017Activity: Participating in or organising an event types › Organisation and participation in conferences, workshops, courses, seminars
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Synchrotron Radiation to Study Atomic Layer Deposition
Mikko Heikkilä (Speaker: Presenter)
12 Jun 2016 → 15 Jun 2016Activity: Participating in or organising an event types › Organisation and participation in conferences, workshops, courses, seminars