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  • PL 55 (A. I. Virtasen aukio 1)

    00014

    Finland

20062019
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Personal profile

Keywords

  • 116 Chemical sciences

International and National Collaboration Publications and projects within past five years.

Publications 2006 2019

  • 68 Article
  • 2 Conference contribution
  • 2 Conference article
  • 1 Review Article

Intercalation of Lithium Ions from Gaseous Precursors into β-MnO2 Thin Films Deposited by Atomic Layer Deposition

Nieminen, H., Miikkulainen, V., Settipani, D., Simonelli, L., Hönicke, P., Zech, C., Kayser, Y., Beckhoff, B., Honkanen, A-P., Heikkilä, M., Mizohata, K., Meinander, N. K., Ylivaara, O. M. E., Huotari, S. & Ritala, M., 3 Jun 2019, In : Journal of Physical Chemistry C. 123, p. 15802-15814

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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Activities 2004 2018

  • 15 Organisation and participation in conferences, workshops, courses, seminars
  • 1 Oral presentation

Materials Characterization by the Combined Analysis

Mikko Heikkilä (Attendee)
26 Nov 201830 Nov 2018

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars

Properties of ALD grown Al2O3-TiO2 laminates investigated by high temperature XRD/XRR and in situ wafer curvature measurements

Mikko Heikkilä (Speaker)
17 Sep 201820 Sep 2018

Activity: Talk or presentation typesOral presentation

2017 E-MRS Fall Meeting and Exhibit

Mikko Heikkilä (Attendee)
18 Sep 201721 Sep 2017

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars

Synchrotron Radiation to Study Atomic Layer Deposition

Mikko Heikkilä (Speaker: Presenter)
12 Jun 201615 Jun 2016

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars

The 12th International Baltic ALD conference

Mikko Heikkilä (Speaker: Presenter)
12 May 201413 May 2014

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars