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  • PL 55 (A. I. Virtasen aukio 1)

    00014

    Finland

20062020

Research output per year

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Personal profile

Fields of Science

  • 116 Chemical sciences

International and National Collaboration Publications and projects within past five years.

Publications

  • 74 Article
  • 2 Conference contribution
  • 2 Conference article
  • 1 Review Article

High temperature x-ray scattering studies of atomic layer deposited IrO2

Heikkilä, M. J., Hämäläinen, J., Puukilainen, E., Leskelä, M. & Ritala, M., 1 Apr 2020, In : Journal of Applied Crystallography. 53, p. 369-380 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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Van der Waals epitaxy of continuous thin films of 2D materials using atomic layer deposition in low temperature and low vacuum conditions

Mattinen, M., King, P. J., Popov, G., Hämäläinen, J., Heikkilä, M. J., Leskelä, M. & Ritala, M., Jan 2020, In : 2D Materials. 7, 1, 8 p., 011003.

Research output: Contribution to journalArticleScientificpeer-review

Al2O3 Thin Films Prepared by a Combined Thermal-Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

Zhu, Z., Merdes, S., Ylivaara, O. M. E., Mizohata, K., Heikkilä, M. J. & Savin, H., 30 Sep 2019, In : Physica Status Solidi. A: Applications and Materials Science. 5 p., 1900237.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl2(TMPDA) and Tert‐Butylhydrazine as Precursors

Väyrynen, K., Hatanpää, T., Mattinen, M., Heikkilä, M. J., Mizohata, K., Räisänen, J., Link, J., Stern, R., Ritala, M. & Leskelä, M., Jun 2019, In : Physica Status Solidi. A: Applications and Materials Science. 216, 11, p. 1900058 9 p., 1900058.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Photoconductive Cu2O Thin Films

Iivonen, T., Heikkilä, M. J., Popov, G., Nieminen, H-E., Kaipio, M., Kemell, M., Mattinen, M., Meinander, K., Mizohata, K., Räisänen, J., Ritala, M. & Leskelä, M., Jun 2019, In : ACS Omega. 4, 6, p. 11205-11214 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File

Activities

  • 15 Organisation and participation in conferences, workshops, courses, seminars
  • 2 Oral presentation

Materials Characterization by the Combined Analysis

Mikko Heikkilä (Attendee)
26 Nov 201830 Nov 2018

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars

Properties of ALD grown Al2O3-TiO2 laminates investigated by high temperature XRD/XRR and in situ wafer curvature measurements

Mikko Heikkilä (Speaker)
17 Sep 201820 Sep 2018

Activity: Talk or presentation typesOral presentation

2017 E-MRS Fall Meeting and Exhibit

Mikko Heikkilä (Attendee)
18 Sep 201721 Sep 2017

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars

Synchrotron Radiation to Study Atomic Layer Deposition

Mikko Heikkilä (Speaker: Presenter)
12 Jun 201615 Jun 2016

Activity: Participating in or organising an event typesOrganisation and participation in conferences, workshops, courses, seminars