Mikko Heikkilä - Activities - University of Helsinki

Phone+358504160572, +358294150216
Emailmikko.j.heikkilahelsinkifi

PL 55 (A. I. Virtasen aukio 1)
00014
Finland

Research activity per year

15 Organisation and participation in conferences, workshops, courses, seminars
2 Oral presentation

2 results
- Title
- Start date(ascending)

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High temperature XRD and XRR studies on atomic layer deposited niobium oxide - silicon oxide nanolaminates
Heikkilä, M. (Speaker)
27 Jun 2019
Activity: Talk or presentation types › Oral presentation
Properties of ALD grown Al2O3-TiO2 laminates investigated by high temperature XRD/XRR and in situ wafer curvature measurements
Heikkilä, M. (Speaker)
17 Sept 2018 → 20 Sept 2018
Activity: Talk or presentation types › Oral presentation