20142019

Research output per year

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Towards space-grade 3D-printed, ALD-coated small satellite propulsion components for fluidics

Kestilä, A., Nordling, K. G. M., Miikkulainen, V., Kaipio, M., Tikka, T., Salmi, M., Auer, A., Leskelä, M. & Ritala, M., Aug 2018, In : Additive manufacturing. 22, p. 31-37 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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Heteroleptic Cyclopentadienyl-Amidinate Precursors for Atomic Layer Deposition (ALD) of Y, Pr, Gd, and Dy Oxide Thin Films

Seppälä, S., Niinistö, J., Blanquart, T., Kaipio, M., Mizohata, K., Räisänen, J., Lansalot-Matras, C., Noh, W., Ritala, M. & Leskelä, M., 11 Jul 2016, In : Chemistry of Materials. 28, 15, p. 5440-5449 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

Blanquart, T., Kaipio, M., Niinistö, J., Gavagnin, M., Longo, V., Blanquart, L., Lansalot, C., Noh, W., Wanzenböck, H. D., Ritala, M. & Leskelä, M., Sep 2014, In : Chemical Vapor Deposition. 20, 7-9, p. 217-223 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of TiO2 and ZrO2 Thin Films Using Heteroleptic Guanidinate Precursors

Kaipio, M., Blanquart, T., Banerjee, M., Xu, K., Niinistö, J., Longo, V., Mizohata, K., Devi, A., Ritala, M. & Leskelä, M., Sep 2014, In : Chemical Vapor Deposition. 20, 7-9, p. 209-216 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Photoconductive Cu2O Thin Films

Iivonen, T., Heikkilä, M. J., Popov, G., Nieminen, H-E., Kaipio, M., Kemell, M., Mattinen, M., Meinander, K., Mizohata, K., Räisänen, J., Ritala, M. & Leskelä, M., Jun 2019, In : ACS Omega. 4, 6, p. 11205-11214 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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Open Access
File

Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO2 Thin Films

Kaipio, M., Blanquart, T., Tomczak, Y., Niinisto, J., Gavagnin, M., Longo, V., Wanzenboeck, H. D., Pallem, V. R., Dussarrat, C., Puukilainen, E., Ritala, M. & Leskela, M., 1 Jul 2014, In : Langmuir. 30, 25, p. 7395-7404 10 p.

Research output: Contribution to journalArticleScientificpeer-review