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Publications 1991 2019

1997

ALE growth of ZnS1-xSex thin films by substituting surface sulfur with elemental selenium

Ihanus, J., Ritala, M., Leskelä, M. & Rauhala, E., 1997, In : Applied Surface Science. 112, p. 154-158 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Complementary analysis of ALE-grown SrS based thin film electroluminescent structures with ion beam methods

Lappalainen, R., Jokinen, J., Li, W. -M., Ritala, M., Leskelä, M. & Soininen, E., 1997, In : Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 132, 4, p. 685-696 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Deposition of copper films by an alternate supply of CuCl and Zn

Juppo, M., Ritala, M. & Leskelä, M., 1997, In : Journal of vacuum science & technology : an official journal of the American Vacuum Society. 15, 4, p. 2330-2333 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Dielectric oxide nanolaminates deposited by atomic layer epitaxy

Kukli, K., Ritala, M. & Leskelä, M., 1997, Chemical vapor deposition : proceedings of the fourteenth international conference and EUROCVD-11 . Pennington : The Electrochemical Society , Vol. 97-25. p. 1137-1144

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Effects of intermediate zinc pulses on properties of TiN and NbN films deposited by atomic layer epitaxy

Ritala, M., Leskelä, M., Asikainen, T., Jokinen, J., Lappalainen, R., Utriainen, M., Niinistö, L. & Ristolainen, E., 1997, In : Applied Surface Science. 120, 3-4, p. 199-212 14 p.

Research output: Contribution to journalArticleScientificpeer-review

Fluorine implantation of atomic layer epitaxy grown In2O3 films

Asikainen, T., Ritala, M., Leskelä, M., Lappalainen, R. & Li, W-M., 1997, In : Journal of the Electrochemical Society. 144, p. L140-L141 2 p.

Research output: Contribution to journalArticleScientificpeer-review

In situ study of atomic layer epitaxy growth of tantalum oxide thin films from Ta(OC2H5)(5) and H2O

Kukli, K., Leskelä, M., Ritala, M., Aarik, J., Aidla, A. & Siimon, H., 1997, In : Applied Surface Science. 112, p. 236-242 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Modifying ALE grown In2O3 films by benzoyl fluoride pulses

Asikainen, T., Leskelä, M., Ritala, M., Li, W-M. & Lappalainen, R., 1997, In : Applied Surface Science. 112, p. 231-235 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Properties of (Nb1-xTax)(z)O-5 solid solutions and (Nb1-xTax)(2)O-5-ZrO2 nanolaminates grown by atomic layer epitaxy

Kukli, K., Ritala, M. & Leskela, M., 1997, In : Nanostructured Materials. 8, 7, p. 785-793 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Properties of Ta2O5-based dielectric nanolaminates deposited by atomic layer epitaxy

Kukli, K., Ihanus, J., Ritala, M. & Leskelä, M., 1997, In : Journal of the Electrochemical Society. 144, 1, p. 300-306 7 p.

Research output: Contribution to journalArticleScientificpeer-review

1996

AFM and STM studies on In2O3 and ITO thin films deposited by atomic layer epitaxy

Asikainen, T., Ritala, M., Leskelä, M., Prohaska, T., Friedbacher, G. & Grasserbauer, M., 1996, In : Applied Surface Science. 99, 2, p. 91-98 8 p.

Research output: Contribution to journalArticleScientificpeer-review

ALE Growth of Transparent Conductors

Ritala, M., Asikainen, T., Leskelä, M. & Skarp, J., 1996, Materials Research Society . Pittsburgh , Vol. 426. p. 513-518 (Materials Research Society Symposium Proceedings ; no. 426).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

ALE - uusi vaihtoehto korroosionestopinnoitteiden valmistukseen?

Ritala, M., Leskelä, M. & Kukkonen, J., 1996, In : Pintatekniikka : pintakäsittelytekniikan ja korroosioneston ammattilehti. 3-4, p. 10-18

Research output: Contribution to journalArticleProfessional

Analysis of AlN thin films by combining TOF-ERDA and NRB techniques

Jokinen, J., Haussalo, P., Keinonen, J., Ritala, M., Leskelä, M. & Riihelä, D., 1996, In : Thin Solid Films. 289, 1-2, p. 159-165 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Analysis of Mixture Back Contact Etch Treated CdTe-Surface with XRD, Glancing Angle XRD, XPS, Profiling XPS, SIMS and NAA

Siponmaa, E., Sarlund, J., Ritala, M. & Leskelä, M., 1996, Thirteenth European Photovoltaic Solar Energy Conference : Proceedings of the International Conference, held at Nice, France 23-27 October, 1995 . H. S. Stephens & Associates , Vol. 2. p. 1658-1661

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Characterization of etching procedure in preparation of CdTe solar cells

Sarlund, J., Ritala, M., Leskela, M., Siponmaa, E. & Zilliacus, R., 1996, In : Solar Energy Materials and Solar Cells. 44, p. 177-190 14 p.

Research output: Contribution to journalArticleScientificpeer-review

Introducing atomic layer epitaxy for the deposition of optical thin films

Riihelä, D., Ritala, M., Leskelä, M. & Matero, R., 1996, In : Thin Solid Films. 289, 1-2, p. 250-255 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Ion Beam Analysis of SrS:Ce Thin Films

Li, W-M., Lappalainen, R., Jokinen, J., Leskelä, M., Ritala, M., Soininen, E. & Hüttl, B., 1996, Inorganic and Organic Electroluminescence . Berlin: Wissenschaft und Technik Verlag, p. 157-160

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Low temperature deposition of AlN films by an alternate supply of trimethyl aluminum and ammonia

Riihelä, D., Jokinen, J., Haussalo, P., Ritala, M., Matero, R. & Leskela, M., 1996, In : Chemical Vapor Deposition. 2, 6, p. 277-283 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Studies on the morphology of Al2O3 thin films grown by atomic layer epitaxy

Ritala, M., Saloniemi, H., Leskelä, M., Prohaska, T., Friedbacher, G. & Grasserbauer, M., 1996, In : Thin Solid Films. 286, 1-2, p. 54-58 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications

Niinistö, L., Ritala, M. & Leskelä, M., 1996, In : Materials Science and Engineering B: Advanced Functional Solid-state Materials. 41, p. 23-29 7 p.

Research output: Contribution to journalReview ArticleScientificpeer-review

Tailoring the dielectric properties of HfO2-Ta2O5 nanolaminates

Kukli, K., Ihanus, J., Ritala, M. & Leskela, M., 1996, In : Applied Physics Letters. 68, 26, p. 3737-3739 3 p.

Research output: Contribution to journalArticleScientificpeer-review

1995

ALE DEPOSITION OF INDIUM TIN OXIDE THIN-FILMS

Asikainen, T., Ritala, M. & Leskelä, M., 1995, In : Vacuum. 46, 8-10, p. 887-887 1 p.

Research output: Contribution to journalArticleScientificpeer-review

ATOMIC LAYER EPITAXY GROWTH OF ALN THIN-FILMS

Elers, K-E., Ritala, M., Leskelä, M. & Johansson, L-S., 1995, In : Journal de physique. IV. 5, C5, p. 1021-1027 7 p.

Research output: Contribution to journalArticleScientificpeer-review

ATOMIC LAYER EPITAXY GROWTH OF TANTALUM OXIDE THIN-FILMS FROM TA(OC2H5)(5) AND H2O

Kukli, K., Ritala, M. & Leskelä, M., 1995, In : Journal of the Electrochemical Society. 142, 5, p. 1670-1675 6 p.

Research output: Contribution to journalArticleScientificpeer-review

ATOMIC LAYER EPITAXY GROWTH OF TIN THIN-FILMS

Ritala, M., Leskelä, M., Rauhala, E. & Haussalo, P., 1995, In : Journal of the Electrochemical Society. 142, 8, p. 2731-2737 7 p.

Research output: Contribution to journalArticleScientificpeer-review

ATOMIC LAYER EPITAXY IN DEPOSITION OF VARIOUS OXIDE AND NITRIDE THIN-FILMS

Leskelä, M. & Ritala, M., 1995, In : Journal de physique. IV. 5, p. 937-951 15 p.

Research output: Contribution to journalReview ArticleScientificpeer-review

Chemistry of Thin Films : Lecture in a series Chemistry Today

Ritala, M., 29 Nov 1995

Research output: Non-textual formDigital or Visual ProductsScientific

COMPARISON BETWEEN CVD AND ALE PRODUCED TIO2 CATHODES IN ZN/(PEO)(4)ZNCL2/TIO2,SNO2 OR ITO GALVANIC CELLS

TURKOVIC, A., DRASNER, A., SOKCEVIC, D., Ritala, M., Asikainen, T. & Leskelä, M., 1995, In : Journal de physique. IV. 5, C5, p. 1133-1139 7 p.

Research output: Contribution to journalArticleScientificpeer-review

GROWTH OF INDIUM-TIN-OXIDE THIN-FILMS BY ATOMIC LAYER EPITAXY

Asikainen, T., Ritala, M. & Leskelä, M., 1995, In : Journal of the Electrochemical Society. 142, 10, p. 3538-3541 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Measurements of the Electrical Properties of Transparent gamma-AlOOH Film

Turkovic, A., Music, S., Dragcevic, D., Popovic, S., Ritala, M., Asikainen, T. & Leskelä, M., 1995, Advances in inorganic films and coatings : proceedings of Topical Symposium I on Advances in Inorganic Films and Coatings of the 8th CIMTEC-World Ceramic Congress and Forum on New Materials, Florence, Italy . TECHNA, p. 2655-2662 (Advances in science and technology ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Programme and abstracts

Leskelä, M., Ritala, M. & Kansikas, J., 1995, Helsinki: University of Helsinki, Department of Chemistry, Laboratory of Inorganic Chemistry. 47 p.

Research output: Book/ReportAnthology or special issueScientificpeer-review

1994

Atomic Layer Epitaxy Growth of Titanium, Zirconium and Hafnium Dioxide Thin Films

Ritala, M., 1994, In : Annales Academiae Scientiarum Fennicae. Chemica. 257, p. 1-48

Research output: Contribution to journalReview ArticleScientificpeer-review

ATOMIC LAYER EPITAXY GROWTH OF TITANIUM-DIOXIDE THIN-FILMS FROM TITANIUM ETHOXIDE

Ritala, M., Leskelä, M. & Rauhala, E., 1994, In : Chemistry of Materials. 6, 4, p. 556-561 6 p.

Research output: Contribution to journalArticleScientificpeer-review

DEVELOPMENT OF CRYSTALLINITY AND MORPHOLOGY IN HAFNIUM DIOXIDE THIN-FILMS GROWN BY ATOMIC LAYER EPITAXY

Ritala, M., Leskelä, M., Niinistö, L., Prohaska, T., Friedbacher, G. & Grasserbauer, M., 1994, In : Thin Solid Films. 250, p. 72-80 9 p.

Research output: Contribution to journalArticleScientificpeer-review

GROWTH OF IN2O3 THIN-FILMS BY ATOMIC LAYER EPITAXY

Asikainen, T., Ritala, M. & Leskelä, M., 1994, In : Journal of the Electrochemical Society. 141, 11, p. 3210-3213 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Growth of In2S3 thin films by atomic layer epitaxy

Asikainen, T., Ritala, M. & Leskelä, M., 1994, In : Applied Surface Science. p. 122-125

Research output: Contribution to journalArticleScientificpeer-review

NbCl5 as a precursor in atomic layer epitaxy

Ritala, M., Leskelä, M., Rauhala, E. & Elers, K-E., 1994, In : Applied Surface Science. 82-83, p. 468-474

Research output: Contribution to journalArticleScientificpeer-review

SURFACE-ROUGHNESS REDUCTION IN ATOMIC LAYER EPITAXY GROWTH OF TITANIUM-DIOXIDE THIN-FILMS

Ritala, M., Leskelä, M., Niinistö, L., Prohaska, T., Friedbacher, G. & Grasserbauer, M., 1994, In : Thin Solid Films. 249, 2, p. 155-162 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Titanium dioxide as a superior transparent conducting oxide for an optimal conversion efficiency of a-Si:H solar cells

Ouwens, J. D., Schropp, R. E. I., Wallinga, J., Weg, W. F., Ritala, M., Leskelä, M. & Hyvärinen, J., 1994, Twelfth European photovoltaic solar energy conference : proceedings of the international conference, held at Amsterdam, the Netherlands 11-15 April, 1994 . Vol. 2. p. 1296-1299

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

ZIRCONIUM DIOXIDE THIN-FILMS DEPOSITED BY ALE USING ZIRCONIUM TETRACHLORIDE AS PRECURSOR

Ritala, M. & Leskelä, M., 1994, In : Applied Surface Science. 75, p. 333-340 8 p.

Research output: Contribution to journalArticleScientificpeer-review

1993

ATOMIC-FORCE MICROSCOPY STUDY OF TITANIUM-DIOXIDE THIN-FILMS GROWN BY ATOMIC LAYER EPITAXY

Ritala, M., Leskelä, M., Johansson, L-S. & Niinistö, L., 1993, In : Thin Solid Films. 228, 1-2, p. 32-35 4 p.

Research output: Contribution to journalArticleScientificpeer-review

GROWTH OF TITANIUM-DIOXIDE THIN-FILMS BY ATOMIC LAYER EPITAXY

Ritala, M., Leskelä, M., Nykänen, E., Soininen, P. & Niinistö, L., 1993, In : Thin Solid Films. 225, 1-2, p. 288-295 8 p.

Research output: Contribution to journalArticleScientificpeer-review

THE EFFECT OF CALCINATION ON THE SURFACE-COMPOSITION AND STRUCTURE OF TITANIUM-DIOXIDE COATED MICA PARTICLES

Eskelinen, P., Ritala, M. & Leskelä, M., 1993, In : Journal of Solid State Chemistry. 103, 1, p. 160-169 10 p.

Research output: Contribution to journalArticleScientificpeer-review

THERMOANALYTICAL STUDIES ON TIO2-MICA PIGMENTS

Leskelä, M., Eskelinen, P. & Ritala, M., 1993, In : Thermochimica Acta. 214, 1, p. 19-26 8 p.

Research output: Contribution to journalArticleScientificpeer-review

TITANIUM ISOPROPOXIDE AS A PRECURSOR IN ATOMIC LAYER EPITAXY OF TITANIUM-DIOXIDE THIN-FILMS

Ritala, M., Leskelä, M., Niinistö, L. & Haussalo, P., 1993, In : Chemistry of Materials. 5, 8, p. 1174-1181 8 p.

Research output: Contribution to journalArticleScientificpeer-review

1991

PLATINUM(II) BINDING TO THE N1 AND N7 RING NITROGENS OF GUANOSINE : KINETICS OF COMPLEXATION OF AQUATED PTII(DIEN) WITH 1-METHYLGUANOSINES AND 7-METHYLGUANOSINES

Ritala, M. & Arpalahti, J., 1991, In : Inorganic Chemistry. 30, p. 2826-2828 3 p.

Research output: Contribution to journalArticleScientificpeer-review