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Publications 1991 2019

2012

High-performance imido-amido precursor for the atomic layer deposition of Ta2O5

Blanquart, T., Longo, V., Niinistö, J., Heikkilä, M., Kukli, K., Ritala, M. & Leskelä, M., 2012, In : Semiconductor Science and Technology. 27, 7, p. - 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Influence of atomic layer deposition chemistry on high-k dielectrics for charge trapping memories

Nikolaou, N., Dimitrakis, P., Normand, P., Ioannou-Sougleridis, V., Giannakopoulos, K., Mergia, K., Kukli, K., Niinistö, J., Ritala, M. & Leskelä, M., 2012, In : Solid-State Electronics. 68, p. 38-47 10 p.

Research output: Contribution to journalArticleScientificpeer-review

In Situ Reaction Mechanism Studies on Atomic Layer Deposition of AlxSiyOz from Trimethylaluminium, Hexakis(ethylamino)disilane, and Water

Tomczak, Y., Knapas, K., Haukka, S., Kemell, M., Heikkilä, M., Ceccato, M., Leskelä, M. & Ritala, M., 23 Oct 2012, In : Chemistry of Materials. 24, 20, p. 3859-3867 9 p.

Research output: Contribution to journalArticleScientificpeer-review

In Situ Reaction Mechanism Studies on the New (BuN)-Bu-t=M(NEt2)(3) -Water and (BuN)-Bu-t=M(NEt2)(3) - Ozone (M = Nb,Ta) Atomic Layer Deposition Processes

Tomczak, Y., Knapas, K., Sundberg, M., Leskelä, M. & Ritala, M., 2012, In : Chemistry of Materials. 24, 9, p. 1555-1561 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Lithium Phosphate Thin Films Grown by Atomic Layer Deposition

Hämäläinen, J., Holopainen, J., Munnik, F., Hatanpää, T., Heikkilä, M., Ritala, M. & Leskelä, M., 2012, In : Journal of the Electrochemical Society. 159, 3, p. A259-A263 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Microcontact Printed RuOx Film as an Activation Layer for Selective-Area Atomic Layer Deposition of Ruthenium

Färm, E., Lindroos, S., Ritala, M. & Leskelä, M., 2012, In : Chemistry of Materials. 24, 2, p. 275-278 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Novel Heteroleptic Precursors for Atomic Layer Deposition of TiO2

Blanquart, T., Niinisto, J., Gavagnin, M., Longo, V., Pallem, V. R., Dussarrat, C., Ritala, M. & Leskelä, M., 11 Sep 2012, In : Chemistry of Materials. 24, 17, p. 3420-3424 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Optical and Dielectric Characterization of Atomic Layer Deposited Nb2O5 Thin Films

Blanquart, T., Kukli, K., Niinistö, J., Longo, V., Heikkilä, M., Ritala, M. & Leskelä, M., 2012, In : ECS Solid State Letters. 1, 1, p. N1-N3 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Passivation of copper surfaces for selective-area ALD using a thiol self-assembled monolayer

Färm, E., Vehkamäki, M., Ritala, M. & Leskelä, M., 2012, In : Semiconductor Science and Technology. 27, 7, p. - 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Preparation of regularly structured nanotubular TiO2 thin films on ITO and their modification with thin ALD-grown layers

Tupala, J., Kemell, M., Härkönen, E., Ritala, M. & Leskelä, M., 2012, In : Nanotechnology. 23, 12, p. 125707 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films

Prokes, S. M., Glembocki, O. J., Cleveland, E., Caldwell, J. D., Foos, E., Niinistö, J. & Ritala, M., 30 Jan 2012, In : Applied Physics Letters. 100, 5, p. 053106 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Study of amorphous lithium silicate thin films grown by atomic layer deposition

Hämäläinen, J., Munnik, F., Hatanpää, T., Holopainen, J., Ritala, M. & Leskelä, M., 2012, In : Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films. 30, 1, p. 01A106 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Surface Chemistry, Reactivity, and Pore Structure of Porous Silicon Oxidized by Various Methods

Riikonen, J., Salomäki, M., van Wonderen, J., Kemell, M., Xu, W., Korhonen, O., Ritala, M., MacMillan, F., Salonen, J. & Lehto, V-P., 2012, In : Langmuir. 28, p. 10573-10583 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Surface fingerprints of individual silicon nanocrystals in laser-annealed Si/SiO2 superlattice: Evidence of nanoeruptions of laser-pressurized silicon

Nikitin, T., Kemell, M., Puukilainen, E., Boninelli, S., Iacona, F., Räsänen, M., Ritala, M., Novikov, S. & Khriachtchev, L., 2012, In : Journal of Physics. D, Applied Physics. 111, 12, p. 124302 7 p.

Research output: Contribution to journalArticleScientificpeer-review

2011

Atomic Layer Deposition and Characterization of Aluminum Silicate Thin Films for Optical Applications

Hämäläinen, J., Ihanus, J., Sajavaara, T., Ritala, M. & Leskelä, M., 2011, In : Journal of the Electrochemical Society. 158, 2, p. P15-P21 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition and Characterization of GeTe Thin Films

Sarnet, T., Pore, V., Hatanpää, T., Ritala, M., Leskelä, M., Schrott, A., Zhu, Y., Raoux, S. & Cheng, H-Y., 2011, In : Journal of the Electrochemical Society. 158, 12, p. D694-D697 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Antimony and its Compounds Using Dechlorosilylation Reactions of Tris(triethylsilyl)antimony

Pore, V., Knapas, K. J. P., Hatanpää, T. T., Sarnet, T., Kemell, M. L., Ritala, M., Leskelä, M. & Mizohata, K., 2011, In : Chemistry of Materials. 23, 2, p. 247-254 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition of ferromagnetic cobalt doped titanium oxide thin films

Pore, V., Dimri, M., Khanduri, H., Stern, R., Lu, J., Hultman, L., Kukli, K., Ritala, M. & Leskelä, M., 2011, In : Thin Solid Films. 519, 10, p. 3318-3324 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of GeTe

Sarnet, T., Pore, V., Hatanpää, T., Ritala, M., Leskelä, M., Schrott, A., Zhu, Y., Raoux, S. & Cheng, H-Y., 2011, European\Phase Change and Ovonics Symposium 2011 Proceedings. p. 210-211 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Atomic layer deposition of ruthenium films from (ethylcyclopentadienyl)(pyrrolyl)ruthenium and oxygen

Kukli, K., Kemell, M. L., Puukilainen, E., Aarik, J., Aidla, A., Sajavaara, T., Laitinen, M., Tallarida, M., Sundqvist, J., Ritala, M. & Leskelä, M., 2011, In : Journal of the Electrochemical Society. 2011/158, 3, p. D158-D165 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition of Ruthenium Films on Strontium Titanate

Kukli, K., Kemell, M., Lu, J., Hultman, L., Riedel, S., Sundqvist, J., Ritala, M. & Leskelä, M., Sep 2011, In : Journal of Nanoscience and Nanotechnology. 11, 9, p. 8378-8382 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Characterization of a 20-nm hard x-ray focus by ptychographic coherent diffractive imaging

Vila-Comamala, J., Diaz, A., Guizar-Sicairos, M., Gorelick, S., Guzenko, V., Karvinen, P., Kewish, C., Färm, E., Ritala, M., Mantion, A., Bunk, O., Menzel, A. & David, C., 2011, Advances in X-Ray: EUV Optics and Components VI. SPIE, Vol. 8139. p. 81390E1-7 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Chemical vapour deposition of In2O3 thin films from a tris-guanidinate indium precursor

Barry, S. T., Gordon, P. G., Ward, M. J., Heikkilä, M. J., Monillas, W. H., Yap, G. P. A., Ritala, M. & Leskelä, M., 16 Aug 2011, In : Dalton Transactions. 40, 37, p. 9425-9430 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Corrosion Protection of Steel with Oxide Nanolaminates Grown by Atomic Layer Deposition

Härkönen, E., Diaz, B., Swiatowska, J., Maurice, V., Seyeux, A., Vehkamäki, M., Sajavaara, T., Fenker, M., Marcus, P. & Ritala, M., 2011, In : Journal of the Electrochemical Society. 158, 11, p. C369-C378 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steel

Díaz, B., Swiatowska, J., Maurice, V., Seyeux, A., Normand, B., Härkönen, E., Ritala, M. & Marcus, P., 2011, In : Electrochimica Acta. 56, 28, p. 10516-10523 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Failure mechanism of thin Al2O3 coatings grown by atomic layer deposition for corrosion protection of carbon steel

Díaz, B., Härkönen, E., Maurice, V., Swiatowska, J., Seyeux, A., Ritala, M. & Marcus, P., 1 Nov 2011, In : Electrochimica Acta. 56, 26, p. 9609-9618 10 p.

Research output: Contribution to journalArticleScientificpeer-review

HTXRD study of atomic layer deposited noble metal thin films heat treated in oxygen

Heikkilä, M. J., Hämäläinen, J., Ritala, M. & Leskelä, M., 2011, In : Zeitschrift für Kristallographie Proceedings. 2011, 1, p. 209-214 6 p.

Research output: Contribution to journalConference articleScientificpeer-review

Influence of HfO2 control oxide ALD precursor chemistry for nitride memories

Nikolaou, N., Dimitrakis, P., Normand, P., Ioannou-Sougleridis, V., Giannakopoulos, K., Mergia, K., Kukli, K., Niinistö, J., Ritala, M. & Leskelä, M., 2011, In : Advanced materials research. 324, p. 42-45 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition

García, H., Castán, H., Gómez, A., Dueñas, S., Bailón, L., Kukli, K., Kariniemi, M., Kemell, M. L., Niinistö, J., Ritala, M. & Leskelä, M., 2011, In : Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 29, 1, p. 01AC04-1 – 01AC04-5 5 p.

Research output: Contribution to journalArticleScientificpeer-review

In situ Reaction Mechanism Studies on Atomic Layer Deposition of Ir and IrO2 from Ir(acac)(3)

Knapas, K. & Ritala, M., 2011, In : Chemistry of Materials. 23, 11, p. 2766-2771 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Integrated photocatalytic micropillar nanoreactor electrospray ionization chip for mimicking phase I metabolic reactions

Nissila, T., Sainiemi, L., Karikko, M-M., Kemell, M., Ritala, M., Franssila, S., Kostiainen, R. & Ketola, R. A., 2011, In : Lab on a Chip. 11, 8, p. 1470-1476 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

Hämäläinen, J., Hatanpää, T. T., Puukilainen, E., Sajavaara, T., Ritala, M. & Leskelä, M., 2011, In : Journal of Materials Chemistry. 21, 41, p. 16488-16493 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars

Caldwell, J., Glembocki, O., Bezares, F., Kariniemi, M. I., Niinistö, J. T., Hatanpää, T. T., Rendell, R., Ukaegbu, M., Ritala, M. K., Prokes, S., Hosten, C., Leskelä, M. A. & Kasica, R., 7 Dec 2011, In : Optics Express. 19, 27, p. 26056-26064 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Low-temperature atomic layer deposition of Al2O3 thin coatings for corrosion protection of steel: Surface and electrochemical analysis

Diaz, B., Härkönen, E., Swiatowska, J., Maurice, V., Seyeux, A., Marcus, P. & Ritala, M., 2011, In : Corrosion Science. 53, 6, p. 2168-2175 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates

David, C., Gorelick, S., Rutishauser, S., Krzywinski, J., Vila-Comamala, J., Guzenco, V., Bunk, O., Färm, E., Ritala, M., Commarata, M., Fritz, D., Barrett, R., Samoylova, L., Grünert, J. & Sinn, H., 2011, In : Scientific Reports. 1, 57, p. 1-5 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File

Novel Materials by Atomic Layer Deposition and Molecular Layer Deposition.

Leskelä, M., Ritala, M. & Nilsen, O., 2011, In : MRS Bulletin. 36, 11, p. 877-884 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Photoswitchable Superabsorbency Based on Nanocellulose Aerogels

Kettunen, M., Silvennoinen, R. J., Houbenov, N., Nykänen, A., Ruokolainen, J., Sainio, J., Pore, V., Kemell, M., Ankerfors, M., Lindström, T., Ritala, M., Ras, R. H. A. & Ikkala, O., 2011, In : Advanced Functional Materials. 21, 3, p. 510-517 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

Kariniemi, M., Niinistö, J., Hatanpää, T., Kemell, M., Sajavaara, T., Ritala, M. & Leskelä, M., 2011, In : Chemistry of Materials. 23, 11, p. 2901-2907 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Spin-coated hydroxyapatite coating mimics human bone with regard to the response of human monocyte cells

Kauppinen, K., Santala, E. J. T., Brooks, R., Juhasz, J., Shepherd, D., Best, S., Ritala, M. K. & Tuukkanen, J., 4 Sep 2011, 24th European Conference on Biomaterials: Annual Conference of the European Society for Biomaterials 2011. Dublin, Ireland, Vol. 1. 2-s2.0-84887003113

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Substrate reactivity effects in the atomic layer deposition of aluminum oxide from trimethylaluminum on ruthenium

Tallarida, M., Kukli, K., Michling, M., Ritala, M., Leskelä, M. & Schmeisser, D., 2011, In : Chemistry of Materials. 23, 13, p. 3159-3168

Research output: Contribution to journalArticleScientificpeer-review

Thermal study on electrospun polyvinylpyrrolidone/ammonium metatungstate nanofibers: optimising the annealing conditions for obtaining WO3 nanofibers

Szilagyi, I. M., Santala, E., Heikkilä, M., Kemell, M., Nikitin, T., Khryashchev, L., Rasanen, M., Ritala, M. & Leskelä, M., 2011, In : Journal of Thermal Analysis and Calorimetry. 105, 1, p. 73-81 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime

Vila-Comamala, J., Gorelick, S., Färm, E., Kewish, C. M., Diaz, A., Barrett, R., Guzenko, V. A., Ritala, M. & David, C., 2011, In : Optics Express. 19, 1, p. 175-184 10 p.

Research output: Contribution to journalArticleScientificpeer-review

2010

(MeCp)Ir(CHD) and molecular oxygen as precursors in atomic layer deposition of iridium

Hämäläinen, J., Hatanpää, T., Puukilainen, E., Costelle, L., Pilvi, T., Ritala, M. & Leskelä, M., 2010, In : Journal of Materials Chemistry. 20, 36, p. 7669-7675 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films

Tamm, A., Kemell, M., Kozlova, J., Sajavaara, T., Tallarida, M., Kukli, K., Sammelselg, V., Ritala, M. & Leskelä, M., 2010, In : Journal of the Electrochemical Society. 157, 10, p. G193-G201 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition and characterization of zirconium oxide-erbium oxide nanolaminates

Tamm, A., Heikkilä, M., Kemell, M., Kozlova, J., Kukli, K., Sammelselg, V., Ritala, M. & Leskelä, M., 2010, In : Thin Solid Films. 519, 2, p. 666-673 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition of high capacitance density Ta₂O₅-ZrO₂ based dielectrics for metal-insulator-metal structures

Jõgi, I., Kukli, K., Ritala, M., Leskelä, M., Aarik, J., Aidla, A. & Lu, J., 2010, In : Microelectronic Engineering. 87, 2, p. 144-149 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Beam-induced damage on diffractive hard X-ray optics

Nygard, K., Gorelick, S., Vila-Comamala, J., Farm, E., Bergamaschi, A., Cervellino, A., Gozzo, F., Patterson, B. D., Ritala, M. & David, C., 2010, In : Journal of Synchrotron Radiation. 17, p. 786-790 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Charge trapping memories with atomic layer deposited high-k dielectrics capping layers

Nikolaou, N., Dimitrakis, P., Normand, P., Giannakopoulos, K., Mergia, K., Ioannou-Sougleridis, V., Kukli, K., Niinistö, J., Ritala, M. & Leskelä, M., 2010, In : Materials Research Society Symposia Proceedings. 1250, p. 1250-G07-03 6 p.

Research output: Contribution to journalConference articleScientificpeer-review

Dense high aspect ratio hydrogen silsesquioxane nanostructures by 100 keV electron beam lithography

Vila-Comamala, J., Gorelick, S., Guzenko, V. A., Färm, E., Ritala, M. & David, C., 2010, In : Nanotechnology. 21, 28, p. 285305 6 p.

Research output: Contribution to journalArticleScientificpeer-review