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Publications 1991 2019

2000

Electrochemical quartz crystal microbalance study of the electrodeposition mechanisms of Cu2-xSe thin films

Kemell, M., Saloniemi, H., Ritala, M. & Leskelä, M., 2000, In : Electrochimica Acta. 45, p. 3737-3748 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Electroluminescent Phosphors

Leskelä, M., Ritala, M. & Li, W-M., 2000, Encyclopedia of Materials: Science and Technology: Functional Phenomena. Part 10 ed. San Diego: Pergamon Press, Vol. Vol. 1.

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Influence of atomic layer deposition parameters on the phase content of Ta2O5 films

Kukli, K., Ritala, M., Matero, R. & Leskelä, M., 2000, In : Journal of Crystal Growth. 212, p. 459-468 10 p.

Research output: Contribution to journalArticleScientificpeer-review

In situ mass spectrometry study on, surface reactions in atomic layer deposition of Al2O3 thin films from trimethylaluminum and water

Juppo, M., Rahtu, A., Ritala, M. & Leskelä, M., 2000, In : Langmuir. 16, 8, p. 4034-4039 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Integration of a quadrupole mass spectrometer and a quartz crystal microbalance for in situ characterization of atomic layer deposition process in flow type reactors

Rahtu, A. & Ritala, M., 2000, CVD XV : proceedings of the Fifteenth International Symposium on Chemical Vapor Deposition. The Electrochemical Society , p. 105-111 (Electrochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Ion Implantation of SrS:Ce Thin Films

Li, W-M., Ritala, M., Leskelä, M., Lappalainen, R., Karjalainen, M., Soininen, E., Barthou, C., Benalloul, P., Benoit, J., Nykänen, E. & Niinistö, L., 2000, In : Journal of the Society for Information Display. Supplement-1, p. 85-90

Research output: Contribution to journalArticleScientificpeer-review

Low-temperature deposition of zirconium oxide-based nanocrystalline films by alternate supply of Zr[OC(CH3)(3)](4) and H2O

Kukli, K., Ritala, M. & Leskelä, M., 2000, In : Chemical Vapor Deposition. 6, 6, p. 297-302 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Menetelmä eristävien oksidiohutkalvojen valmistamiseksi

Leskelä, M., Ritala, M., Hatanpää, T., Hänninen, T. & Vehkamäki, M., 2000, IPC No. H01L 39/24 , Patent No. 108375 , 15 Jan 2002

Research output: PatentScientific

Method for growing thin oxide films

Leskelä, M., Ritala, M., Kukli, K. & Rahtu, A. H., 2000, IPC No. C30B 2514, Patent No. 6632279 , 14 Oct 2003

Research output: PatentScientific

One-step electrodeposition of Cu2-xSe and CuInSe2 thin films by the induced co-deposition mechanism

Kemell, M., Ritala, M., Saloniemi, H., Leskelä, M., Sajavaara, T. & Rauhala, E., 2000, In : Journal of the Electrochemical Society. 147, 3, p. 1080-1087 8 p.

Research output: Contribution to journalArticleScientificpeer-review

PbTe electrodeposition studied by combined electrochemical quartz crystal microbalance and cyclic voltammetry

Saloniemi, H., Kemell, M., Ritala, M. & Leskelä, M., 2000, In : Journal of Electroanalytical Chemistry. 482, p. 139-148 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Pulsing of H2 during the ALE growth of SrS:Cu

Ihanus, J., Ritala, M., Leskelä, M., Soininen, E., Lahonen, M., Kaloyeros, A., Harris, W., Barth, K., Topol, A., Park, W., Sajavaara, T. P. & Keinonen, J., 2000, Proceedings of The 10th International Workshop on Inorganic and Organic Electroluminescence (EL'00). Hamamatsu, Japan, p. 443-446 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Real-time monitoring in atomic layer deposition of TiO2 from TiI4 and H2O-H2O2

Kukli, K., Aidla, A., Aarik, J., Schuisky, M., Hårsta, A., Ritala, M. & Leskelä, M., 2000, In : Langmuir. 16, 21, p. 8122-8128 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Titanium isopropoxide as a precursor for atomic layer deposition: Characterization of titanium dioxide growth process

Aarik, J., Aidla, A., Uustare, T., Ritala, M. & Leskelä, M., 2000, In : Applied Surface Science. 161, p. 385-395 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Use of 1,1-dimethylhydrazine in the atomic layer deposition of transition metal nitride thin films

Juppo, M., Ritala, M. & Leskelä, M., 2000, In : Journal of the Electrochemical Society. 147, 9, p. 3377-3381 5 p.

Research output: Contribution to journalArticleScientificpeer-review

1999

ALD precursor chemistry: Evolution and future challenges

Leskelä, M. & Ritala, M., 1999, In : Journal de physique. IV. 9, p. 837-852 16 p.

Research output: Contribution to journalReview ArticleScientificpeer-review

Atomic layer deposited thin films for corrosion protection

Matero, R., Ritala, M., Leskelä, M., Salo, T., Aromaa, J. & Forsén, O., 1999, In : Journal de physique. IV. 9, p. 493-499 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer epitaxy - a valuable tool for nanotechnology?

Ritala, M. & Leskelä, M., 1999, In : Nanotechnology. 10, p. 19-24 6 p.

Research output: Contribution to journalReview ArticleScientificpeer-review

Controlled growth of TaN, Ta3N5, and TaOxNy thin films by atomic layer deposition

Ritala, M., Kalsi, P., Riihelä, D., Kukli, K., Leskelä, M. & Jokinen, J., 1999, In : Chemistry of Materials. 11, 7, p. 1712-1718 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Cyclic electrodeposition of PbS thin films

Saloniemi, H., Ritala, M., Leskelä, M. & Lappalainen, R., 1999, In : Journal of the Electrochemical Society. 146, 7, p. 2522-2525 4 p.

Research output: Contribution to journalArticleScientificpeer-review

European Young Surface Chemists Workshop

Ritala, M., 1999, In : Kemia - Kemi. 26, p. 583

Research output: Contribution to journalArticleProfessional

Growth of SrTiO3 and BaTiO3 thin films by atomic layer deposition

Vehkamäki, M., Hatanpää, T., Hänninen, T., Ritala, M. & Leskelä, M., 1999, In : Electrochemical and Solid-State Letters. 2, 10, p. 504-506 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Improved blue luminescence in Ag-codoped SrS : Ce thin films made by atomic layer epitaxy and ion implantation

Li, W-M., Ritala, M., Leskelä, M., Lappalainen, R., Soininen, E., Niinistö, L., Barthou, C., Benalloul, P. & Benoit, J., 1999, In : Applied Physics Letters. 74, 16, p. 2298-2300 3 p.

Research output: Contribution to journalArticleScientificpeer-review

In situ characterization of atomic layer deposition processes by a mass spectrometer

Ritala, M., Juppo, M., Kukli, K., Rahtu, A. & Leskelä, M., 1999, In : Journal de physique. IV. 9, p. 1021-1028 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Materials in Thin Film Electroluminescence Devices

Leskelä, M., Ritala, M. & Li, W-M., 1999, Semiconductors and Semimetals,: Electroluminescence II. Academic Press, Vol. Vol. 65. p. 413-487

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Menetelmä laitteistojen sisäpintojen päällystämiseksi

Suntola, T., Leskelä, M. & Ritala, M., 1999, Patent No. 104383

Research output: PatentScientific

Method for Coating Inner Surfaces of Equipment

Leskelä, M., Ritala, M. & Suntola, T., 1999, IPC No. C30B/2502; C30B/3500; C23C/1600, Patent No. 6416577, 9 Jul 2002

Research output: PatentScientific

Modification of ALE-grown SrS thin films by ion implantation of Cu and codopants

Sajavaara, T., Lappalainen, R., Arstila, K., Li, W. -M., Ritala, M., Leskelä, M. & Soininen, E., 1999, In : Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 148, 1-4, p. 715-719 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Perfectly conformal TiN and Al2O3 films deposited by atomic layer deposition

Ritala, M., Leskelä, M., Dekker, J-P., Mutsaers, C., Soininen, P. J. & Skarp, J., 1999, In : Chemical Vapor Deposition. 5, 1, p. 7-9 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Photo- and electroluminescence of SrS : Cu and SrS : Ag,Cu,Ga thin films

Li, W-M., Ritala, M., Leskelä, M., Niinistö, L., Soininen, E., Sun, S-S., Tong, W. & Summers, C. J., 1999, In : Journal of Applied Physics. 86, 9, p. 5017-5025 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Properties of [Mg(2)(thd)(4)] as a precursor for atomic layer deposition of MgO thin films and crystal structures of [Mg(2)(thd)(4)] and [Mg(thd)(2)(EtOH)(2)]

Hatanpää, T., Ihanus, J., Kansikas, J., Mutikainen, I., Ritala, M. & Leskelä, M., 1999, In : Chemistry of Materials. 11, 7, p. 1846-1852 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Properties of atomic layer deposited (Ta1-xNbx)(2)O-5 solid solution films and Ta2O5-Nb2O5 nanolaminates

Kukli, K., Ritala, M. & Leskelä, M., 1999, In : Journal of Applied Physics. 86, 10, p. 5656-5662 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Use of atomic layer epitaxy for fabrication of Si/TiN/Cu structures

Mårtensson, P., Juppo, M., Ritala, M., Leskelä, M. & Carlsson, J. O., 1999, In : Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 17, 5, p. 2122-2128 7 p.

Research output: Contribution to journalArticleScientificpeer-review

1998

Atomic layer epitaxy growth of BaS and BaS:Ce thin films from in situ synthesized Ba(thd)(2)

Saanila, V., Ihanus, J., Ritala, M. & Leskelä, M., 1998, In : Chemical Vapor Deposition. 4, 6, p. 227-233 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer epitaxy growth of TiN thin films from TiI4 and NH3

Ritala, M., Leskelä, M., Rauhala, E. & Jokinen, J., 1998, In : Journal of the Electrochemical Society. 145, 8, p. 2914-2920 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Deposition of molybdenum thin films by an alternate supply of MoCl5 and Zn

Juppo, M., Vehkamäki, M., Ritala, M. & Leskelä, M., 1998, In : Journal of vacuum science & technology : an official journal of the American Vacuum Society. 16, 5, p. 2845-2850 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Electrodeposition of lead selenide thin films

Saloniemi, H., Kanniainen, T., Ritala, M., Leskelä, M. & Lappalainen, R., 1998, In : Journal of Materials Chemistry. 8, 3, p. 651-654 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Electrodeposition of PbTe thin films

Saloniemi, H., Kanniainen, T., Ritala, M. & Leskelä, M., 1998, In : Thin Solid Films. 326, p. 78-82 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Elemental characterization of electroluminescent SrS : Ce thin films

Li, W-M., Ritala, M., Leskelä, M., Lappalainen, R., Jokinen, J., Soininen, E., Hüttl, B., Nykänen, E. & Niinistö, L., 1998, In : Journal of Applied Physics. 84, 2, p. 1029-1035 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Enhanced growth rate in atomic layer epitaxy of indium oxide and indium-tin oxide thin films

Ritala, M., Asikainen, T. & Leskelä, M., 1998, In : Electrochemical and Solid-State Letters. 1, 3, p. 156-157 2 p.

Research output: Contribution to journalArticleScientificpeer-review

Influence of sol and surface properties on in vitro bioactivity of sol-gel-derived TiO2 and TiO2-SiO2 films deposited by dip-coating method

Jokinen, M., Pätsi, M., Rahiala, H., Peltola, T., Ritala, M. & Rosenholm, J. B., 1998, In : Journal of Biomedical Materials Research. Part A. 42, 2, p. 295-302 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Niobium oxide thin films grown by atomic layer epitaxy

Kukli, K., Leskelä, M., Ritala, M. & Lappalainen, R., 1998, In : Chemical Vapor Deposition. 4, 1, p. 29-34 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Pintakemialliset reaktiot vaikuttavat materiaalin koko elinkaareen

Ritala, M., 1998, In : Kemia - Kemi. 25, 1, p. 62-63

Research output: Contribution to journalArticleProfessional

Solid Solution CdxZn1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic

Valkonen, M., Ritala, M., Lindroos, S. & Leskelä, M., 1998, Trends and New Applications of Thin Films: Proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF 98). Uetikon-Zuerich, Vol. 287-288. p. 367-370 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Solid Solution CdxZn1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic Layer Adsorption and Reaction Techniques

Valkonen, M. P., Ritala, M., Lindroos, S. & Leskelä, M., 1998, Materials science forum . Aademannsdorf : TransTech Publications , Vol. 287-288. p. 367-370

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1997

[Ca(Thd)(2)(tetraen)]: A monomeric precursor for deposition of CaS thin films

Hänninen, T. P., Leskelä, M., Mutikainen, I., Ritala, M., Saanila, V. & Hanson, J. C., 1997, In : Chemistry of Materials. 9, p. 1234-1240 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Advanced ALE processes of amorphous and polycrystalline films

Ritala, M., 1997, In : Applied Surface Science. 112, p. 223-230 8 p.

Research output: Contribution to journalReview ArticleScientificpeer-review

AFM studies on ZnS thin films grown by atomic layer epitaxy

Ihanus, J., Ritala, M., Leskelä, M., Prohaska, T., Resch, R., Friedbacher, G. & Grasserbauer, M., 1997, In : Applied Surface Science. 120, 1-2, p. 43-50 8 p.

Research output: Contribution to journalArticleScientificpeer-review

ALE growth of SrS1-xSex thin films by substituting surface sulfur with elemental selenium

Ihanus, J., Ritala, M. & Leskelä, M., 1997, Chemical vapor deposition : proceedings of the fourteenth international conference and EUROCVD-11 . Allendorf, M. D. & Bernard, C. (eds.). Pennington, NJ: The Electrochemical Society , Vol. 97-25 . p. 1423-1428 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review