1991 …2019
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Publications 1991 2019

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2015

MANOS erase performance dependence on Nitrogen annealing conditions

Ioannou-Sougleridis, V., Nikolaou, N., Dimitrakis, P., Normand, P., Skarlatos, D., Travlos, A., Kukli, K., Niinisto, J., Ritala, M. & Leskela, M., 2015, Materials and technology for nonvolatile memories. Dimitrakis, P., Fujisaki, Y., Hu, G. & Tokumitsu, E. (eds.). Cambridge: Cambridge University Press, p. 15-20 ( Materials Research Society symposia proceedings; no. 1729).

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

2014

PCRAM

Raoux, S. & Ritala, M., 2014, Atomic Layer Deposition for Semiconductors. Hwang, C. S. & Yoo, C. Y. (eds.). New York: Springer, p. 123-148 26 p.

Research output: Chapter in Book/Report/Conference proceedingChapterScientific

2009

Atomic Layer Deposition

Ritala, M. & Niinistö, J., 2009, Chemical Vapour Deposition : Precursors, Processes and Applications . Jones, A. C. & Hitchman, M. J. (eds.). The Royal Society of Chemistry, p. 158-

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

2008

Atomic layer deposition

Ritala, M. & Niinistö, J., 2008, Chemical vapour deposition. Cambridge: The Royal Society of Chemistry, p. 158-206 49 p.

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

2006

Impact of Atomic Layer Deposition Chemistry to the Quality of High-Permittivity Metal Oxide Thin Solid Films

Kukli, K., Ritala, M. & Leskelä, M., 2006, New Materials and Processes for Incoming Semiconductor Technologies. Dueñas, S. & Castán, H. (eds.). Trivandrum, Kerala, India: Transworld Research Network, p. 1-40

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

2004

Atomic Layer Deposition

Ritala, M., 2004, High-k Gate Dielectrics. Houssa, M. (ed.). Institute of Physics Publishing, p. 17-64

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

2002

Atomic Layer Deposition

Ritala, M. & Leskelä, M., 2002, Handbook of Thin Films Materials: Deposition and Processing of Thin Films. Nalwa, H. S. (ed.). Academic Press, Vol. Volume 1. p. 103-159

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

2000

Electroluminescent Phosphors

Leskelä, M., Ritala, M. & Li, W-M., 2000, Encyclopedia of Materials: Science and Technology: Functional Phenomena. Part 10 ed. San Diego: Pergamon Press, Vol. Vol. 1.

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

1999

Materials in Thin Film Electroluminescence Devices

Leskelä, M., Ritala, M. & Li, W-M., 1999, Semiconductors and Semimetals,: Electroluminescence II. Academic Press, Vol. Vol. 65. p. 413-487

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review