1991 …2019
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Publications 1991 2019

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2017

Admittance memory cycles of Ta2O5-ZrO2-based RRAM devices

Duenas, S., Castan, H., Ossorio, O. G., Dominguez, L. A., Gracia, H., Kalam, K., Kukli, K., Ritala, M. & Leskelä, M., 2017, 2017 32ND CONFERENCE ON DESIGN OF CIRCUITS AND INTEGRATED SYSTEMS (DCIS). IEEE, 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2016

Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)

Autere, A., Karvonen, L., Säynätjoki, A., Roussey, M., Roenn, J., Färm, E., Kemell, M., Tu, X., Liow, T-Y., Lo, P., Ritala, M., Leskelä, M., Lipsanen, H., Honkanen, S. & Sun, Z., 2016, Silicon Photonics and Photonic Integrated Circuits V, proceedings. Pavesi, L., Vivien, L. & Pelli, S. (eds.). Brussels: SPIE, Vol. 9891. 98910

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2015

High-quality slot waveguide ring resonator based on atomic layer deposition

Autere, A., Karvonen, L., Saynatjoki, A., Roussey, M., Färm, E., Kemell, M., Tu, X., Liow, T. Y., Lo, G. Q., Ritala, M., Leskelä, M., Honkanen, S. & Sun, Z., 2015, SILICON PHOTONICS X . Reed, GT. & Watts, MR. (eds.). SPIE, 7 p. 93671J. (Proceedings of SPIE ; vol. 9367 ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Resistless fabrication of embedded nanochannels by FIB patterning, wet etching and atomic layer deposition

Han, Z., Vehkamäki, M. J., Leskelä, M. & Ritala, M. K., 2015, Proceedings of the 15th IEEE International Conference on Nanotechnology. IEEE, p. 1008-1011 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

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2014

Heteroleptic Precursors for Atomic Layer Deposition

Niinisto, J., Blanquart, T., Seppala, S., Ritala, M. & Leskela, M., 2014, Atomic Layer Deposition Applications 10. Roozeboom, F., DeGendt, S., Delabie, A., Elam, JW., Londergan, A. & VanDerStraten, O. (eds.). ELECTROCHEMICAL SOC INC, p. 221-232 12 p. (ECS Transactions; vol. 64, no. 9).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2011

Atomic Layer Deposition of GeTe

Sarnet, T., Pore, V., Hatanpää, T., Ritala, M., Leskelä, M., Schrott, A., Zhu, Y., Raoux, S. & Cheng, H-Y., 2011, European\Phase Change and Ovonics Symposium 2011 Proceedings. p. 210-211 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Characterization of a 20-nm hard x-ray focus by ptychographic coherent diffractive imaging

Vila-Comamala, J., Diaz, A., Guizar-Sicairos, M., Gorelick, S., Guzenko, V., Karvinen, P., Kewish, C., Färm, E., Ritala, M., Mantion, A., Bunk, O., Menzel, A. & David, C., 2011, Advances in X-Ray: EUV Optics and Components VI. SPIE, Vol. 8139. p. 81390E1-7 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Spin-coated hydroxyapatite coating mimics human bone with regard to the response of human monocyte cells

Kauppinen, K., Santala, E. J. T., Brooks, R., Juhasz, J., Shepherd, D., Best, S., Ritala, M. K. & Tuukkanen, J., 4 Sep 2011, 24th European Conference on Biomaterials: Annual Conference of the European Society for Biomaterials 2011. Dublin, Ireland, Vol. 1. 2-s2.0-84887003113

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2010

High Spatial Resolution STXM at 6.2 keV Photon Energy

Vila-Comamala, J., Dierolf, M., Kewish, C. M., Thibault, P., Pilvi, T., Färm, E., Guzenko, V., Gorelick, S., Menzel, A., Bunk, O., Ritala, M., Pfeiffer, F. & David, C., 2010, Proceedings of the 20th International Congress on X-ray Optics and Microanalysis: AIP Conference Proceedings. American Institute of Physics, Vol. 1221 . p. 80-84 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability

Rissanen, A., Tuppura, K., Laamanen, M., Puurunen, R., Färm, E., Ritala, M. & Leskelä, M., 2010, IEEE SENSORS 2010 Conference. p. 767-700 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2009

Atomic Layer Deposition of Germanium Antimony Telluride Thin Films

Ritala, M., Pore, V., Hatanpää, T., Heikkilä, M., Leskelä, M., Schrott, A., Raoux, S. & Rossnagel, S. M., 2009, Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig. p. 151-156 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical characterization of high-k based MIS capacitors using flat-band voltage transients

García, H., Dueñas, S., Castán, H., Gómez, A., Bailón, L., Hatanpää, T., Aarik, J., Aidla, A., Ritala, M. & Leskelä, M., 2009, Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, p. 223-226

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical characterization of ZrO2-based MIS structures with highly doped Si substrates

Gómez, A., Dueñas, S., Castán, H., García, H., Bailón, L., Kukli, K., Niinistö, J., Ritala, M. & Leskelä, M., 2009, Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, p. 227-230 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Fabrication of Silicon Nanostructures with Electric Discharge

Suni, N., Haapala, M., Färm, E., Ritala, M., Kotiaho, T., Sainiemi, L., Franssila, S. & Kostiainen, R., 2009, 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. p. 254-256 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors

Castán, H., Dueñas, S., García, H., Gómez, A., Bailón, L., Kukli, K., Niinistö, J., Ritala, M. & Leskelä, M., 2009, Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, p. 8-11 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

TiO2-Microchip combined to mass spectrometer for mimicking phase I metabolic reactions

Nissilä, T., Sainiemi, L., Karikko, M-M., Kemell, M. L., Ritala, M., Franssila, S., Kostiainen, R. & Ketola, R., 2009, Proceedings of the 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2009), November 1-5, Jeju, Korea. Kim, T. S. & Lee, Y-S. (eds.). Jeju: Chemical and Biological Microsystems Society, p. 1922-1924 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2008

Electric discharge method for selective surface modification in the fabrication on microfluidic structures

Suni, N., Haapala, M., Mäkinen, A., Sainiemi, L., Franssila, S., Färm, E., Ritala, M., Puukilainen, E. & Kostiainen, R., 2008, Proceedings of µTAS 2008. p. 898-900 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2007

A Nordic Project on Enhanced Functionality of Self-cleaning and Antibacterial Surface Coatings (FUNCOAT)

Mäkelä, J. M., Keskinen, H., Aromaa, M., Hupa, L., Piispanen, M., Deppert, K., Persson, S., Lang, M., Gunnarsson, G., Pimenoff, J., Kronberg, T., Pore, V., Ritala, M., Raulio, M., Salkinoja-Salonen, M. S. & Airaksinen, V. M., 2007, 10th International Conference and Exhibition of European Ceramic Society, Berlin 2007, Extended Abstracts: Proceeding.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic layer deposition in nanotechnology applications

Leskelä, M., Kemell, M., Lautala, M., Pilvi, T., Pore, V., Santala, E. & Ritala, M., 2007, Abstracts of Papers: 234th ACS National Meeting. American Chemical Society, p. INOR-413

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Photocatalytic nanofibers and nanotubes made by atomic layer deposition.

Leskelä, M., Kemell, M., Pore, V., Santala, E. & Ritala, M., 2007, Abstracts of Papers, 233rd ACS National Meeting. p. INOR-028

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2006

Disordered Structure and Density of Gap States in High-Permittivity Thin Solid Films

Kukli, K., Dueñas, S., Castán, H., Garcia, H., Barbolla, J., Aarik, J., Aidla, A., Ritala, M. & Leskelä, M., 2006, Defects in High-k Gate Dielectric Stacks: Nano-Electronic Semiconductor Devices. Gusev, E. (ed.). Springer, p. 123-134 12 p. (NATO Science Series II. Mathematics, Physcis and Chemistry; vol. 220).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical Defects in Atomic Layer Deposited HfO2 Films on Silicon: Influence of Precursor Chemistries and Substrate Treatment

Dueñas, S., Castán, H., Garcia, H., Bailón, L., Kukli, K., Ritala, M. & Leskelä, M., 2006, NATO Science Series II : Mathematics, Physics and Chemistry . Vol. 220. p. 287-298

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2005

A comparative study of atomic layer deposited advanced high-k dielectrics

Dueñas, S., Castán, H., García, H., Barbolla, J., Kukli, K., Aarik, J., Ritala, M. & Leskelä, M., 2005, 2005 Spanish Conference on Electron Devices. Institute of Electrical and Electronics Engineers, p. 29-32 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic Layer Deposition of Molybdenum Nitride Films

Alen, P., Ritala, M. & Leskelä, M., 2005, Advanced Metallization Conference 2004 (AMC 2004). Erb, D. (ed.). Materials Research Society, p. 763-768 6 p. (MRS Conference Proceedings Series; vol. 20).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic Layer Deposition of Noble Metals

Aaltonen, T., Ritala, M. & Leskelä, M., 2005, Proceedings of Advanced Metallization Conference 2004. Erb, D., Ramm, P., Masu, K. & Osaki, A. (eds.). Warrensdale, PA: Materials Research Society, p. 663-667 5 p. (MRS Conference Proceedings Series; vol. 20).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Diffractive optics in industry and research: novel components for optical security systems

Laakkonen, P., Turunen, J., Pietarinen, J., Siitonen, S., Laukkanen, J., Jefimovs, K., Orava, J., Ritala, M., Pilvi, T., Tuovinen, H., Ventola, K., Vallius, T., Kaipiainen, M. & Kuittinen, M., 2005, Optical Security Systems (Proceedings Volume) / Editor(s): Zbigniew Jaroszewicz; Sergei Y. Popov; Frank Wyrowski. - SPIE-The International Society for Optical Engineering, 2005. Jaroszewicz, Z., Popov, S. Y. & Wyrowski, F. (eds.). SPIE, Vol. 5954. p. art no 595402 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical characterization of atomic-layer-deposited hafnium silicate for alternative gate dielectric application

Dueñas, S., Castán, H., García, H., Barbolla, J., Kukli, K., Ritala, M. & Leskelä, M., 2005, 2005 Spanish Conference on Electron Devices: Proceedings. Institute of Electrical and Electronics Engineers, p. 45-48 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2004

Atomic Layer Deposition - an Alternative to the Deposition of Optical Coatings?

Ritala, M. & Leskelä, M., 2004, Technical Digest of 9th Optical Interference Coatings Meeting . Tucson , p. art no MB1 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic layer deposition of molybdenum nitride diffusion barriers for Cu interconnects

Alen, P., Ritala, M., Arstila, K., Keinonen, J., Sajavaara, T. & Leskela, M., 2004, Unknown host publication. Erb, D., Ramm, P., Masu, K. & Osaki, A. (eds.). p. 763-768 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Liquid Injection MOCVD and ALD Studies of "Single Source" Sr-Nb and Sr-Ta Precursors

Potter, R. J., Marshall, P. A., Roberts, J. L., Jones, A. C., Chalker, P. R., Vehkamäki, M., Ritala, M., Leskelä, M., Williams, P. A., Davies, H. O., Tobin, N. L. & Smith, L. M., 2004, Materials Research Society Symposium Proceedings . Vol. 784. p. 97 12 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

On the Interface Quality of MIS Structures Fabricated from Atomic Layer Deposition of HfO2, Ta2O5 and Nb2O5-Ta2O5-Nb2O5 Dielectric Thin Films

Dueñas, S., Castán, H., Garcia, H., Barbolla, J., Kukli, K., Ritala, M. & Leskelä, M., 2004, Materials Research Society Symposium Proceedings . p. 147 6 p. (Materials Research Society Online Proceedings Library; vol. 786).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2003

Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition

Hatanpää, T., Hänninen, T., Ihanus, J., Kansikas, J., Mutikainen, I., Vehkamäki, M., Ritala, M. & Leskelä, M., 2003, Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium. Allendorf, M. D., Maury, F. & Teyssandier, F. (eds.). Pennington, NJ : The Electrochemical Society , Vol. 2003-08. p. 516-522 7 p. (Electrochemical Society Proceedings ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic layer deposition of ruthenium from RuCp₂ and oxygen: film growth and reaction mechanism studies

Aaltonen, T., Rahtu, A., Ritala, M. & Leskelä, M., 2003, Electrochemical Society Proceedings . Vol. 2003-08. p. 946-953 (Electrcochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2002

Atomic-layer deposition of ZrO2 thin films using new alkoxide precursors

Jones, A. C., Williams, P. A., Roberts, J. L., Leedham, T. J., Davies, H. O., Matero, R., Ritala, M. & Leskelä, M., 2002, Materials Research Society symposia proceedings . New York, NY : North-Holland, p. 145-150 (Materials Research Society Proceedings; vol. 716).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic Layer Deposition Processes of HfO2 Thin Films and Layered HfO2-Al2O3-Nb2O5 Dielectrics

Kukli, K., Ritala, M. & Leskelä, M., 2002, Conference Papers : 4th International Conference on Materials for Microelectronics and Nanoengineering . p. 97-100

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

New approaches to the atomic layer deposition of tantalum nitride and titanium nitride thin films

Juppo, M., Alén, P., Ritala, M. & Leskelä, M., 2002, Conference Proceedings ULSI XVII . p. 633-639

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2000

Atomic layer deposition of high-k oxides

Ritala, M., Kukli, K., Vehkamäki, M., Hänninen, T., Hatanpää, T. T., Leskelä, M. & Räisänen, P. I., 2000, Proceedings - Electrochemical Society: CVD XV. The Electrochemical Society , Vol. 2000-13. p. 597-604 8 p. (Electrochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Atomic layer deposition of metal oxide films by using metal alkoxides as an oxygen source

Räisänen, P., Kukli, K., Rahtu, A., Ritala, M. & Leskelä, M., 2000, Chemical vapor deposition XV . The Electrochemical Society , p. 623-628 (Electrochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Integration of a quadrupole mass spectrometer and a quartz crystal microbalance for in situ characterization of atomic layer deposition process in flow type reactors

Rahtu, A. & Ritala, M., 2000, CVD XV : proceedings of the Fifteenth International Symposium on Chemical Vapor Deposition. The Electrochemical Society , p. 105-111 (Electrochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Pulsing of H2 during the ALE growth of SrS:Cu

Ihanus, J., Ritala, M., Leskelä, M., Soininen, E., Lahonen, M., Kaloyeros, A., Harris, W., Barth, K., Topol, A., Park, W., Sajavaara, T. P. & Keinonen, J., 2000, Proceedings of The 10th International Workshop on Inorganic and Organic Electroluminescence (EL'00). Hamamatsu, Japan, p. 443-446 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1998

Solid Solution CdxZn1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic

Valkonen, M., Ritala, M., Lindroos, S. & Leskelä, M., 1998, Trends and New Applications of Thin Films: Proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF 98). Uetikon-Zuerich, Vol. 287-288. p. 367-370 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Solid Solution CdxZn1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic Layer Adsorption and Reaction Techniques

Valkonen, M. P., Ritala, M., Lindroos, S. & Leskelä, M., 1998, Materials science forum . Aademannsdorf : TransTech Publications , Vol. 287-288. p. 367-370

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1997

ALE growth of SrS1-xSex thin films by substituting surface sulfur with elemental selenium

Ihanus, J., Ritala, M. & Leskelä, M., 1997, Chemical vapor deposition : proceedings of the fourteenth international conference and EUROCVD-11 . Allendorf, M. D. & Bernard, C. (eds.). Pennington, NJ: The Electrochemical Society , Vol. 97-25 . p. 1423-1428 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Dielectric oxide nanolaminates deposited by atomic layer epitaxy

Kukli, K., Ritala, M. & Leskelä, M., 1997, Chemical vapor deposition : proceedings of the fourteenth international conference and EUROCVD-11 . Pennington : The Electrochemical Society , Vol. 97-25. p. 1137-1144

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1996

ALE Growth of Transparent Conductors

Ritala, M., Asikainen, T., Leskelä, M. & Skarp, J., 1996, Materials Research Society . Pittsburgh , Vol. 426. p. 513-518 (Materials Research Society Symposium Proceedings ; no. 426).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Analysis of Mixture Back Contact Etch Treated CdTe-Surface with XRD, Glancing Angle XRD, XPS, Profiling XPS, SIMS and NAA

Siponmaa, E., Sarlund, J., Ritala, M. & Leskelä, M., 1996, Thirteenth European Photovoltaic Solar Energy Conference : Proceedings of the International Conference, held at Nice, France 23-27 October, 1995 . H. S. Stephens & Associates , Vol. 2. p. 1658-1661

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Ion Beam Analysis of SrS:Ce Thin Films

Li, W-M., Lappalainen, R., Jokinen, J., Leskelä, M., Ritala, M., Soininen, E. & Hüttl, B., 1996, Inorganic and Organic Electroluminescence . Berlin: Wissenschaft und Technik Verlag, p. 157-160

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1995

Measurements of the Electrical Properties of Transparent gamma-AlOOH Film

Turkovic, A., Music, S., Dragcevic, D., Popovic, S., Ritala, M., Asikainen, T. & Leskelä, M., 1995, Advances in inorganic films and coatings : proceedings of Topical Symposium I on Advances in Inorganic Films and Coatings of the 8th CIMTEC-World Ceramic Congress and Forum on New Materials, Florence, Italy . TECHNA, p. 2655-2662 (Advances in science and technology ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1994

Titanium dioxide as a superior transparent conducting oxide for an optimal conversion efficiency of a-Si:H solar cells

Ouwens, J. D., Schropp, R. E. I., Wallinga, J., Weg, W. F., Ritala, M., Leskelä, M. & Hyvärinen, J., 1994, Twelfth European photovoltaic solar energy conference : proceedings of the international conference, held at Amsterdam, the Netherlands 11-15 April, 1994 . Vol. 2. p. 1296-1299

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review