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Publications 1991 2019

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Conference article
2018

Study of the influence of the dielectric composition of Al/Ti/ZrO2:Al2O3/TiN/Si/Al structures on the resistive switching behavior for memory applications

Castán, H., Dueñas, S., Kukli, K., Kemell, M., Ritala, M. & Leskelä, M., 2018, In : ECS transactions. 85, 8, p. 143-148 6 p.

Research output: Contribution to journalConference articleScientificpeer-review

2017

Atomic layer deposited protective layers

Leskelä, M., Salmi, E. & Ritala, M., 2017, In : Materials Science Forum. 879, p. 1086-1092 7 p.

Research output: Contribution to journalConference articleScientificpeer-review

2014

Single-parameter model for the post-breakdown conduction characteristics of HoTiOx-based MIM capacitors

Blasco, J., Castan, H., Garcia, H., Duenas, S., Sune, J., Kemell, M., Kukli, K., Ritala, M., Leskelä, M. & Miranda, E., 2014, In : Microelectronics Reliability. 54, 9-10, p. 1707-1711 5 p.

Research output: Contribution to journalConference articleScientificpeer-review

2011

HTXRD study of atomic layer deposited noble metal thin films heat treated in oxygen

Heikkilä, M. J., Hämäläinen, J., Ritala, M. & Leskelä, M., 2011, In : Zeitschrift für Kristallographie Proceedings. 2011, 1, p. 209-214 6 p.

Research output: Contribution to journalConference articleScientificpeer-review

2010

Charge trapping memories with atomic layer deposited high-k dielectrics capping layers

Nikolaou, N., Dimitrakis, P., Normand, P., Giannakopoulos, K., Mergia, K., Ioannou-Sougleridis, V., Kukli, K., Niinistö, J., Ritala, M. & Leskelä, M., 2010, In : Materials Research Society Symposia Proceedings. 1250, p. 1250-G07-03 6 p.

Research output: Contribution to journalConference articleScientificpeer-review

Properties of HfO2 and HfO2:Y Films Grown by Atomic Layer Deposition in an Advanced Monocyclopentadienyl-based Process

Tamm, A., Kukli, K., Niinistö, J., Lu, J., Ritala, M. & Leskelä, M., 2010, In : IOP Conference Series: Materials Science and Engineering . 8, 1, p. 012022 4 p.

Research output: Contribution to journalConference articleScientificpeer-review

2009

Advanced x-ray diffractive optics

Vila-Comamala, J., Jefimovs, K., Pilvi, T., Ritala, M., Sarkar, S. S., Solak, H. H., Guzenko, V. A., Stampanoni, M., Marone, F., Raabe, J., Tzvetkov, G., Fink, R. H., Grolimund, D., Borca, C. N., Kaulich, B. & David, C., 2009, In : Journal of Physics : Conference Series. 186, 1, p. art no 012078 3 p.

Research output: Contribution to journalConference articleScientificpeer-review

2008

Novel Zirconium Precursors for Atomic Layer Deposition of ZrO2 Films

Chen, T., Cameron, T. M., Nguyen, S. D., Stauf, G. T., Peters, D. W., Maylott, L., Li, W., Xu, C., Roeder, J. F., Hendrix, B. C., Hilgarth, M., Niinistö, J., Kukli, K., Ritala, M. & Leskelä, M., 2008, In : ECS transactions. 16, 4, p. 87-101

Research output: Contribution to journalConference articleScientificpeer-review

2007

Electrical Characterization of High-k Dielectrics by Means of Flat-Band Voltage Transient Recording

Dueñas, S., Castán, H., Garcia, H., Bailón, L., Kukli, K., Ritala, M. & Leskelä, M., 2007, In : Materials Research Society Symposia Proceedings. 996E, p. 169 -174 6 p.

Research output: Contribution to journalConference articleScientificpeer-review

Study of Atomic Layer Deposited Gadolinium Oxide Thin Films on Silicon

Dueñas, S., Castán, H., Garcia, H., Gómez, A., Bailón, L., Kukli, K., Hatanpää, T., Lu, J., Ritala, M. & Leskelä, M., 2007, In : Materials Research Society Symposia Proceedings. 996, p. 133-138 6 p.

Research output: Contribution to journalConference articleScientificpeer-review

2005

Atomic Layer Deposition of Metal Thin Films

Leskelä, M., Aaltonen, T., Hämäläinen, J., Niskanen, A. J. & Ritala, M. K., 2005, In : Proceedings - Electrochemical Society. 9, p. 545-554

Research output: Contribution to journalConference articleScientificpeer-review

2003

Atomic layer deposition of thin films for microelectronics

Ritala, M. & Leskelä, M., 2003, In : Proceedings - Electrochemical Society. 8, p. 479-490

Research output: Contribution to journalConference articleScientificpeer-review