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Publications 1991 2019

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2016

Atomic layer deposition of aluminum fluoride thin films

Mäntymäki, M., Ritala, M. & Leskelä, M., 19 Jul 2016, Patent No. US 9,394,609 B2, 19 Jul 2016

Research output: PatentScientific

Atomic Layer Deposition of Metal Phosphates and Lithium Silicates

Hamalainen, J., Holopainen, J., Hatanpaa, T., Ritala, M. & Leskela, M., 19 Apr 2016, Patent No. US9315894 B2, 19 Apr 2016

Research output: PatentScientific

Vapor deposition of LiF thin films

Mäntymäki, M., Hämäläinen, J., Ritala, M. & Leskelä, M., 5 Jul 2016, Patent No. US 9,382,615 B2, 5 Jul 2016

Research output: PatentScientific

2014

Metal oxide films

Rahtu, A. H., Matero, R., Leskelä, M., Ritala, M., Hatanpää, T. T., Hänninen, T. P. & Vehkamäki, M., 1 Apr 2014, IPC No. C30B21/02, Patent No. US8685165 B2, 1 Apr 2014

Research output: PatentScientific

2013

Methods for Forming Thin Films Comprising Tellurium

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 12 Feb 2013, IPC No. C23C16/06 , Patent No. US8372483 (B2)

Research output: PatentScientific

Synthesis and Application for tellurium and selenium ald precursor film

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 25 Dec 2013, IPC No. C23C16/06, H01L21/205, C23C16/44, C23C16/16, Patent No. CN 102076882 B, 23 Apr 2009, Priority date 25 Apr 2008

Research output: PatentScientific

2010

Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films.

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 14 Jan 2010, IPC No. C23C 16/455, Patent No. 2010/0009078 A1

Research output: PatentScientific

2009

Method of depositing rare earth oxide thin films

Niinistö, J., Putkonen, M., Ritala, M., Räisänen, P., Niskanen, A. & Leskelä, M., 5 Feb 2009, IPC No. H01L 21/44, Patent No. 7498272, 3 Mar 2009

Research output: PatentScientific

Methods for Forming of Conductive Titanium Oxides Thin Films

Pore, V., Ritala, M. & Leskelä, M., 3 Dec 2009, IPC No. BOSD 5/12 , Patent No. 2009/0297696 A1

Research output: PatentScientific

2007

Process for Producing Oxide Films

Hatanpää, T. T., Vehkamäki, M., Ritala, M. & Leskelä, M., 28 Jun 2007, IPC No. C23C 16/06, Patent No. US 7713584 , 11 May 2010

Research output: PatentScientific

2005

Process for Producing Bismuth-Containing Oxide Films

Leskelä, M., Vehkamäki, M., Hatanpää, T. T. & Ritala, M., 28 Apr 2005, IPC No. C23C16/00 C23C16/40 C23C16/06 , Patent No. 7618681 , 17 Nov 2009

Research output: PatentScientific

2003

Method of Depositing Rare Earth Oxide Thin Films

Niinistö, J., Putkonen, M., Ritala, M., Räisänen, P., Niskanen, A. & Leskelä, M., 13 Apr 2003, IPC No. H01L021/44; H01L021/31; H01L021/469, Patent No. 6858546, 22 Feb 2005

Research output: PatentScientific

2002

Menetelmä metallinitridiohutkalvojen valmistamiseksi

Leskelä, M., Ritala, M., Alén, P. & Juppo, M., 2002, IPC No. B05D 1/12 ; C23C 16/44 , Patent No. 109770 , 15 Oct 2002

Research output: PatentScientific

Method to Make Nitride Thin Films

Leskelä, M., Ritala, M., Alen, P. J. & Juppo, M., 2002, IPC No. C30B/2814, Patent No. 6706115, 16 Mar 2004

Research output: PatentScientific

Process for producing metal thin films by ALD

Aaltonen, T., Alén, P., Ritala, M. & Leskelä, M., 2002, IPC No. B05D/512, Patent No. 6824816 , 30 Nov 2004

Research output: PatentScientific

2000

Menetelmä eristävien oksidiohutkalvojen valmistamiseksi

Leskelä, M., Ritala, M., Hatanpää, T., Hänninen, T. & Vehkamäki, M., 2000, IPC No. H01L 39/24 , Patent No. 108375 , 15 Jan 2002

Research output: PatentScientific

Method for growing thin oxide films

Leskelä, M., Ritala, M., Kukli, K. & Rahtu, A. H., 2000, IPC No. C30B 2514, Patent No. 6632279 , 14 Oct 2003

Research output: PatentScientific

1999

Menetelmä laitteistojen sisäpintojen päällystämiseksi

Suntola, T., Leskelä, M. & Ritala, M., 1999, Patent No. 104383

Research output: PatentScientific

Method for Coating Inner Surfaces of Equipment

Leskelä, M., Ritala, M. & Suntola, T., 1999, IPC No. C30B/2502; C30B/3500; C23C/1600, Patent No. 6416577, 9 Jul 2002

Research output: PatentScientific