Research output per year
Research output per year
Publications
- 2 Article
Search results
-
2024
Atomic Layer Deposition of Molybdenum Carbide Thin Films
Kärkkäinen, P., Popov, G., Hatanpää, T., Kemppinen, A., Kohopää, K., Bagheri, M., Komsa, H.-P., Heikkilä, M., Mizohata, K., Chundak, M., Deminskyi, P., Vihervaara, A., Ribeiro, M., Hätinen, J., Govenius, J., Putkonen, M. & Ritala, M., 1 Jul 2024, In: Advanced Materials Interfaces . 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
2023
In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes
Nieminen, H.-E., Chundak, M., Heikkila, M. J., Karkkainen, P. R., Vehkamaki, M., Putkonen, M. & Ritala, M., Mar 2023, In: Journal of vacuum science & technology : an official journal of the American Vacuum Society. 41, 2, 11 p., 022401.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile