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  • PL 55 (A. I. Virtasen aukio 1)

    00014

    Finland

19992019
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Publications 1999 2019

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Conference contribution
2011

Atomic Layer Deposition of GeTe

Sarnet, T., Pore, V., Hatanpää, T., Ritala, M., Leskelä, M., Schrott, A., Zhu, Y., Raoux, S. & Cheng, H-Y., 2011, European\Phase Change and Ovonics Symposium 2011 Proceedings. p. 210-211 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

2009

Atomic Layer Deposition of Germanium Antimony Telluride Thin Films

Ritala, M., Pore, V., Hatanpää, T., Heikkilä, M., Leskelä, M., Schrott, A., Raoux, S. & Rossnagel, S. M., 2009, Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig. p. 151-156 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Electrical characterization of high-k based MIS capacitors using flat-band voltage transients

García, H., Dueñas, S., Castán, H., Gómez, A., Bailón, L., Hatanpää, T., Aarik, J., Aidla, A., Ritala, M. & Leskelä, M., 2009, Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, p. 223-226

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2003

Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition

Hatanpää, T., Hänninen, T., Ihanus, J., Kansikas, J., Mutikainen, I., Vehkamäki, M., Ritala, M. & Leskelä, M., 2003, Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium. Allendorf, M. D., Maury, F. & Teyssandier, F. (eds.). Pennington, NJ : The Electrochemical Society , Vol. 2003-08. p. 516-522 7 p. (Electrochemical Society Proceedings ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2000

Atomic layer deposition of high-k oxides

Ritala, M., Kukli, K., Vehkamäki, M., Hänninen, T., Hatanpää, T. T., Leskelä, M. & Räisänen, P. I., 2000, Proceedings - Electrochemical Society: CVD XV. The Electrochemical Society , Vol. 2000-13. p. 597-604 8 p. (Electrochemical Society Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review