No photo of Timo Hatanpää
  • PL 55 (A. I. Virtasen aukio 1)

    00014

    Finland

19992019
If you made any changes in Pure these will be visible here soon.

Publications 1999 2019

Filter
Patent
2016

Atomic Layer Deposition of Metal Phosphates and Lithium Silicates

Hamalainen, J., Holopainen, J., Hatanpaa, T., Ritala, M. & Leskela, M., 19 Apr 2016, Patent No. US9315894 B2, 19 Apr 2016

Research output: PatentScientific

2014

Metal oxide films

Rahtu, A. H., Matero, R., Leskelä, M., Ritala, M., Hatanpää, T. T., Hänninen, T. P. & Vehkamäki, M., 1 Apr 2014, IPC No. C30B21/02, Patent No. US8685165 B2, 1 Apr 2014

Research output: PatentScientific

2013

Methods for Forming Thin Films Comprising Tellurium

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 12 Feb 2013, IPC No. C23C16/06 , Patent No. US8372483 (B2)

Research output: PatentScientific

Synthesis and Application for tellurium and selenium ald precursor film

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 25 Dec 2013, IPC No. C23C16/06, H01L21/205, C23C16/44, C23C16/16, Patent No. CN 102076882 B, 23 Apr 2009, Priority date 25 Apr 2008

Research output: PatentScientific

2010

Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films.

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 14 Jan 2010, IPC No. C23C 16/455, Patent No. 2010/0009078 A1

Research output: PatentScientific

2007

Process for Producing Oxide Films

Hatanpää, T. T., Vehkamäki, M., Ritala, M. & Leskelä, M., 28 Jun 2007, IPC No. C23C 16/06, Patent No. US 7713584 , 11 May 2010

Research output: PatentScientific

2005

Process for Producing Bismuth-Containing Oxide Films

Leskelä, M., Vehkamäki, M., Hatanpää, T. T. & Ritala, M., 28 Apr 2005, IPC No. C23C16/00 C23C16/40 C23C16/06 , Patent No. 7618681 , 17 Nov 2009

Research output: PatentScientific