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Timo Hatanpää

  • PL 55 (A. I. Virtasen aukio 1)

    00014

    Finland

19992019

Research output per year

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Publications

  • 67 Article
  • 7 Patent
  • 5 Conference contribution
  • 1 Doctoral Thesis
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Patent
2016

Atomic Layer Deposition of Metal Phosphates and Lithium Silicates

Hamalainen, J., Holopainen, J., Hatanpaa, T., Ritala, M. & Leskela, M., 19 Apr 2016, Patent No. US9315894 B2, 19 Apr 2016

Research output: Patent

2014

Metal oxide films

Rahtu, A. H., Matero, R., Leskelä, M., Ritala, M., Hatanpää, T. T., Hänninen, T. P. & Vehkamäki, M., 1 Apr 2014, IPC No. C30B21/02, Patent No. US8685165 B2, 1 Apr 2014

Research output: Patent

2013

Methods for Forming Thin Films Comprising Tellurium

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 12 Feb 2013, IPC No. C23C16/06 , Patent No. US8372483 (B2)

Research output: Patent

Synthesis and Application for tellurium and selenium ald precursor film

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 25 Dec 2013, IPC No. C23C16/06, H01L21/205, C23C16/44, C23C16/16, Patent No. CN 102076882 B, 23 Apr 2009, Priority date 25 Apr 2008

Research output: Patent

2010

Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films.

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 14 Jan 2010, IPC No. C23C 16/455, Patent No. 2010/0009078 A1

Research output: Patent

2007

Process for Producing Oxide Films

Hatanpää, T. T., Vehkamäki, M., Ritala, M. & Leskelä, M., 28 Jun 2007, IPC No. C23C 16/06, Patent No. US 7713584 , 11 May 2010

Research output: Patent

2005

Process for Producing Bismuth-Containing Oxide Films

Leskelä, M., Vehkamäki, M., Hatanpää, T. T. & Ritala, M., 28 Apr 2005, IPC No. C23C16/00 C23C16/40 C23C16/06 , Patent No. 7618681 , 17 Nov 2009

Research output: Patent