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Timo Hatanpää

  • PL 55 (A. I. Virtasen aukio 1)

    00014

    Finland

19992019

Research output per year

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Publications

  • 67 Article
  • 7 Patent
  • 5 Conference contribution
  • 1 Doctoral Thesis
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Doctoral Thesis
2019

Precursor Chemistry for Atomic Layer Deposition

Hatanpää, T., 2019, Helsinki: Helsingin yliopisto.

Research output: ThesisDoctoral ThesisCollection of Articles

Open Access