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Tuomas Vainikka

  • PL 64 (Gustaf Hällströmin katu 2)

    00014

    Finland

20172018
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Publications 2017 2018

  • 1 Chapter
  • 1 Conference article
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Chapter
2017

Direct laser writing: virtual mask optimization for optical quality control artefact

Järvinen, M. A., Scotti, G., Vainikka, T., Haeggström, E. & Kassamakov, I., 2017, Photomask technology 2017: 11-14 September 2017, Monterey, California, United States . Buck, P. & Gallagher, E. (eds.). Bellingham, Washington: SPIE, 9 p. (Proceedings of SPIE ; vol. 10451).

Research output: Chapter in Book/Report/Conference proceedingChapterScientific