Ville Miikkulainen – Publications — University of Helsinki

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26 Article
1 Conference contribution
1 Conference article
1 Review Article

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2015

Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials
Klepper, K. B., Miikkulainen, K. V. A., Nilsen, O., Fjellvåg, H., Liu, M., Dutta, D., Gidley, D., Lanford, W., Ross, L., Li, H. & King, S. W., 1 May 2015, In: MRS Proceedings . 1791, p. 15-20 6 p.
Research output: Contribution to journal › Conference article › Scientific › peer-review