Research output per year
Research output per year
Personal profile
Fields of Science
- 116 Chemical sciences
International and National Collaboration
Publications and projects within past five years.
Publications
- 3 Article
-
Atomic Layer Deposition of Boron-Doped Al2O3 Dielectric Films
Li, X., Vehkamäki, M., Chundak, M., Mizohata, K., Vihervaara, A., Leskelä, M., Putkonen, M. & Ritala, M., Jun 2023, In: Advanced Materials Interfaces . 10, 18, 8 p., 2300173.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Molecular layer deposition of hybrid silphenylene-based dielectric film
Li, X., Vehkamäki, M., Chundak, M., Mizohata, K., Vihervaara, A., Putkonen, M., Leskelä, M. & Ritala, M., 11 Oct 2023, In: Advanced composites and hybrid materials. 6, 5, 11 p., 183.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films
Li, X., Vehkamaki, M., Heikkila, M., Mattinen, M., Putkonen, M., Leskela, M. & Ritala, M., Mar 2021, In: Coatings. 11, 3, 13 p., 355.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile
Projects
- 1 Active
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A European Training Network for Functional Hybrid Coatings by Molecular Layer Deposition
01/08/2018 → …
Project: Research project