A comparative study of atomic layer deposited advanced high-k dielectrics

S. Dueñas, H. Castán, H. García, J. Barbolla, K. Kukli, J. Aarik, M. Ritala, M. Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication2005 Spanish Conference on Electron Devices
    Number of pages4
    PublisherInstitute of Electrical and Electronics Engineers
    Publication date2005
    ISBN (Print)0-7803-8810-0
    Publication statusPublished - 2005
    MoE publication typeA4 Article in conference proceedings
    Event5th Spanish Conference on Electron Devices - Tarragona, Spain
    Duration: 2 Feb 20054 Feb 2005
    Conference number: 5th

    Fields of Science

    • 116 Chemical sciences

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