Abstract
In this work, we first simulated the amorphization of crystalline quartz under 50 keV Na-23 ion irradiation with classical molecular dynamics (MD). We then used binary collision approximation algorithms to simulate the Rutherford backscattering spectrometry in channeling conditions (RBS-C) from these irradiated MD cells, and compared the RBS-C spectra with experiments. The simulated RBS-C results show an agreement with experiments in the evolution of amorphization as a function of dose, showing what appears to be (by this measure) full amorphization at about 2.2 eV.atom(-1). We also applied other analysis methods, such as angular structure factor, Wigner-Seitz, coordination analysis and topological analysis, to analyze the structural evolution of the irradiated MD cells. The results show that the atomic-level structure of the sample keeps evolving after the RBS signal has saturated, until the dose of about 5 eV.atom(-1). The continued evolution of the SiO2 structure makes the definition of what is, on the atomic level, an amorphized quartz ambiguous.
Original language | English |
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Article number | 015403 |
Journal | Journal of Physics. Condensed Matter |
Volume | 30 |
Issue number | 1 |
Number of pages | 10 |
ISSN | 0953-8984 |
DOIs | |
Publication status | Published - 10 Jan 2018 |
MoE publication type | A1 Journal article-refereed |
Fields of Science
- 114 Physical sciences
- amorphization of quartz
- ion irradiation
- Rutherford backscattering spectrometry in channelling conditions
- molecular dynamics
- MOLECULAR-DYNAMICS SIMULATION
- BEAM-INDUCED AMORPHIZATION
- RADIATION-DAMAGE
- ALPHA-QUARTZ
- FUSED-SILICA
- SI
- IMPLANTATION
- RANGE
- SEMICONDUCTORS
- CRYSTALLINE