Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials,

Lauri Niinistö; Jani Päiväsaari; Jaakko Niinistö; Matti Putkonen; Minna Nieminen

Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials,

Lauri Niinistö, Jani Päiväsaari, Jaakko Niinistö, Matti Putkonen, Minna Nieminen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Journal	Physica Status Solidi. A: Applications and Materials Science
Volume	201
Pages (from-to)	1443-1452
ISSN	1862-6300
Publication status	Published - 2004
Externally published	Yes
MoE publication type	A1 Journal article-refereed

Cite this

@article{aab9333c7513486e9139a43902d2bcfa,

title = "Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials,",

author = "Lauri Niinist{\"o} and Jani P{\"a}iv{\"a}saari and Jaakko Niinist{\"o} and Matti Putkonen and Minna Nieminen",

year = "2004",

language = "English",

volume = "201",

pages = "1443--1452",

journal = "Physica Status Solidi. A: Applications and Materials Science",

issn = "1862-6300",

publisher = "Wiley-VCH Verlag",

}

Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials, / Niinistö, Lauri; Päiväsaari, Jani; Niinistö, Jaakko et al.
In: Physica Status Solidi. A: Applications and Materials Science, Vol. 201, 2004, p. 1443-1452.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials,

AU - Niinistö, Lauri

AU - Päiväsaari, Jani

AU - Niinistö, Jaakko

AU - Putkonen, Matti

AU - Nieminen, Minna

PY - 2004

Y1 - 2004

M3 - Article

SN - 1862-6300

VL - 201

SP - 1443

EP - 1452

JO - Physica Status Solidi. A: Applications and Materials Science

JF - Physica Status Solidi. A: Applications and Materials Science

ER -