ALD for amino-functionalization of silicon surfaces using aminoalkoxysilanes and water

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• HelsinkiALD

  Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)

  Department of Chemistry

  Facility/equipment: Research Laboratory