ALD from emerging applications to industrial production: selected examples beyond IC technology

Research output: Book/Report › Commissioned report

Original language	English

Publication status	Published - 2011
Externally published	Yes
MoE publication type	D4 Published development or research report or study

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory

Equipment