ALE DEPOSITION OF INDIUM TIN OXIDE THIN-FILMS

Timo Asikainen, Mikko Ritala, Markku Leskelä

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    JournalVacuum
    Volume46
    Issue number8-10
    Pages (from-to)887-887
    Number of pages1
    ISSN0042-207X
    Publication statusPublished - 1995
    MoE publication typeA1 Journal article-refereed

    Fields of Science

    • 116 Chemical sciences

    Cite this