Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition

Timo Hatanpää, Timo Hänninen, Jarkko Ihanus, Jarno Kansikas, Ilpo Mutikainen, Marko Vehkamäki, Mikko Ritala, Markku Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationChemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
    EditorsM. D. Allendorf, F. Maury, F. Teyssandier
    Number of pages7
    Volume2003-08
    Place of PublicationPennington, NJ
    PublisherThe Electrochemical Society
    Publication date2003
    Pages516-522
    ISBN (Print)1-56677-378-4
    Publication statusPublished - 2003
    MoE publication typeA4 Article in conference proceedings
    EventChemical vapor deposition XVI and EUROCVD 14 International Symbosium - Pariisi, France
    Duration: 27 Apr 20032 May 2003
    Conference number: 16

    Publication series

    NameElectrochemical Society Proceedings
    PublisherElectrochemical Society

    Fields of Science

    • 116 Chemical sciences

    Cite this

    Hatanpää, T., Hänninen, T., Ihanus, J., Kansikas, J., Mutikainen, I., Vehkamäki, M., ... Leskelä, M. (2003). Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition. In M. D. Allendorf, F. Maury, & F. Teyssandier (Eds.), Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium (Vol. 2003-08, pp. 516-522 ). (Electrochemical Society Proceedings ). Pennington, NJ : The Electrochemical Society .
    Hatanpää, Timo ; Hänninen, Timo ; Ihanus, Jarkko ; Kansikas, Jarno ; Mutikainen, Ilpo ; Vehkamäki, Marko ; Ritala, Mikko ; Leskelä, Markku. / Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition. Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium. editor / M. D. Allendorf ; F. Maury ; F. Teyssandier. Vol. 2003-08 Pennington, NJ : The Electrochemical Society , 2003. pp. 516-522 (Electrochemical Society Proceedings ).
    @inproceedings{33abc6d3e0644541b9b31002368ad588,
    title = "Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition",
    keywords = "116 Chemical sciences",
    author = "Timo Hatanp{\"a}{\"a} and Timo H{\"a}nninen and Jarkko Ihanus and Jarno Kansikas and Ilpo Mutikainen and Marko Vehkam{\"a}ki and Mikko Ritala and Markku Leskel{\"a}",
    note = "Volume: Proceeding volume: 2003-08",
    year = "2003",
    language = "English",
    isbn = "1-56677-378-4",
    volume = "2003-08",
    series = "Electrochemical Society Proceedings",
    publisher = "The Electrochemical Society",
    pages = "516--522",
    editor = "Allendorf, {M. D.} and F. Maury and F. Teyssandier",
    booktitle = "Chemical vapor deposition XVI and EUROCVD 14",
    address = "United States",

    }

    Hatanpää, T, Hänninen, T, Ihanus, J, Kansikas, J, Mutikainen, I, Vehkamäki, M, Ritala, M & Leskelä, M 2003, Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition. in MD Allendorf, F Maury & F Teyssandier (eds), Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium. vol. 2003-08, Electrochemical Society Proceedings , The Electrochemical Society , Pennington, NJ , pp. 516-522 , Chemical vapor deposition XVI and EUROCVD 14 International Symbosium, Pariisi, France, 27/04/2003.

    Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition. / Hatanpää, Timo; Hänninen, Timo; Ihanus, Jarkko ; Kansikas, Jarno; Mutikainen, Ilpo; Vehkamäki, Marko; Ritala, Mikko; Leskelä, Markku.

    Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium. ed. / M. D. Allendorf; F. Maury; F. Teyssandier. Vol. 2003-08 Pennington, NJ : The Electrochemical Society , 2003. p. 516-522 (Electrochemical Society Proceedings ).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    TY - GEN

    T1 - Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition

    AU - Hatanpää, Timo

    AU - Hänninen, Timo

    AU - Ihanus, Jarkko

    AU - Kansikas, Jarno

    AU - Mutikainen, Ilpo

    AU - Vehkamäki, Marko

    AU - Ritala, Mikko

    AU - Leskelä, Markku

    N1 - Volume: Proceeding volume: 2003-08

    PY - 2003

    Y1 - 2003

    KW - 116 Chemical sciences

    M3 - Conference contribution

    SN - 1-56677-378-4

    VL - 2003-08

    T3 - Electrochemical Society Proceedings

    SP - 516

    EP - 522

    BT - Chemical vapor deposition XVI and EUROCVD 14

    A2 - Allendorf, M. D.

    A2 - Maury, F.

    A2 - Teyssandier, F.

    PB - The Electrochemical Society

    CY - Pennington, NJ

    ER -

    Hatanpää T, Hänninen T, Ihanus J, Kansikas J, Mutikainen I, Vehkamäki M et al. Alkaline earth cyclopentadienyl compounds as precursors for atomic layer deposition. In Allendorf MD, Maury F, Teyssandier F, editors, Chemical vapor deposition XVI and EUROCVD 14: proceedings of the international symposium. Vol. 2003-08. Pennington, NJ : The Electrochemical Society . 2003. p. 516-522 . (Electrochemical Society Proceedings ).