@article{35fdcbc416b04f04af29098b7ed23ae9,
title = "Analysis of AlN thin films by combining TOF-ERDA and NRB techniques",
keywords = "aluminium nitride, depth profiling, nuclear resonance broadening, time-of-flight elastic recoil detection analysis, ELASTIC RECOIL DETECTION, LIGHT-ELEMENTS, SPECTROMETRY, MASS, RESOLUTION, HYDROGEN, SYSTEM, 114 Physical sciences, 116 Chemical sciences",
author = "Janne Jokinen and Pekka Haussalo and Juhani Keinonen and Mikko Ritala and Markku Leskel{\"a} and Diana Riihel{\"a}",
year = "1996",
language = "English",
volume = "289",
pages = "159--165",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
number = "1-2",
}