Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Valtteri Lasonen; Anton Vihervaara; Georgi Popov; Eva Tois; Lars Mester; Mohammad Karimi; Yoana Ilarionova; Reza Jafari Jam; Jonas Sundqvist; Mikko Ritala

doi:10.1021/acs.chemmater.3c01185

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Valtteri Lasonen, Anton Vihervaara, Georgi Popov, Eva Tois, Lars Mester, Mohammad Karimi, Yoana Ilarionova, Reza Jafari Jam, Jonas Sundqvist, Mikko Ritala

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Journal	Chemistry of Materials
Volume	35
Issue number	15
Pages (from-to)	6097-6108
Number of pages	12
ISSN	0897-4756
DOIs	https://doi.org/10.1021/acs.chemmater.3c01185
Publication status	Published - 22 Jul 2023
MoE publication type	A1 Journal article-refereed

Fields of Science

Atomic layer deposition
Noble-metals
Waste
116 Chemical sciences

Access to Document

10.1021/acs.chemmater.3c01185Licence: CC BY

lasonen-et-al-2023-area-selective-etching-of-poly(methyl-methacrylate)-films-by-catalytic-decompositionFinal published version, 6.71 MBLicence: CC BY

HelsinkiALD
Matti Putkonen (Manager), Mikko Ritala (Manager), Miia Mäntymäki (Operator), Marianna Kemell (Operator), Marko Vehkamäki (Operator) & Mikko Heikkilä (Operator)
Department of Chemistry
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Cite this

@article{60f55488726742808854f1b89d0d50b4,

title = "Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition",

keywords = "Atomic layer deposition, Noble-metals, Waste, 116 Chemical sciences",

author = "Valtteri Lasonen and Anton Vihervaara and Georgi Popov and Eva Tois and Lars Mester and Mohammad Karimi and Yoana Ilarionova and Jam, {Reza Jafari} and Jonas Sundqvist and Mikko Ritala",

year = "2023",

month = jul,

day = "22",

doi = "10.1021/acs.chemmater.3c01185",

language = "English",

volume = "35",

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issn = "0897-4756",

publisher = "American Chemical Society",

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TY - JOUR

T1 - Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

AU - Lasonen, Valtteri

AU - Vihervaara, Anton

AU - Popov, Georgi

AU - Tois, Eva

AU - Mester, Lars

AU - Karimi, Mohammad

AU - Ilarionova, Yoana

AU - Jam, Reza Jafari

AU - Sundqvist, Jonas

AU - Ritala, Mikko

PY - 2023/7/22

Y1 - 2023/7/22

KW - Atomic layer deposition

KW - Noble-metals

KW - Waste

KW - 116 Chemical sciences

U2 - 10.1021/acs.chemmater.3c01185

DO - 10.1021/acs.chemmater.3c01185

M3 - Article

SN - 0897-4756

VL - 35

SP - 6097

EP - 6108

JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 15

ER -

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Fields of Science

Access to Document

Equipment

HelsinkiALD

Cite this