Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Valtteri Lasonen, Anton Vihervaara, Georgi Popov, Eva Tois, Lars Mester, Mohammad Karimi, Yoana Ilarionova, Reza Jafari Jam, Jonas Sundqvist, Mikko Ritala

Research output: Contribution to journal › Article › Scientific › peer-review

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- Title(descending)

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory