Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors

J. Härkönen, J. Ott, Maarit Mäkelä, T. Arsenovich, A. Gädda, T. Peltola, E. Tuovinen, P. Luukka, E. Tuominen, A. Junkes, J. Niinistö, M. Ritala

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalNuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
Volume831
Pages (from-to)2-6
Number of pages5
ISSN0168-9002
DOIs
Publication statusPublished - 21 Sep 2016
MoE publication typeA1 Journal article-refereed

Fields of Science

  • ALD
  • TiN
  • Detector
  • Bias resistor
  • AL2O3
  • 114 Physical sciences
  • 116 Chemical sciences

Cite this

@article{d6b583c75a424974aac2fcccdd3e8134,
title = "Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors",
keywords = "ALD, TiN, Detector, Bias resistor, AL2O3, 114 Physical sciences, 116 Chemical sciences",
author = "J. H{\"a}rk{\"o}nen and J. Ott and Maarit M{\"a}kel{\"a} and T. Arsenovich and A. G{\"a}dda and T. Peltola and E. Tuovinen and P. Luukka and E. Tuominen and A. Junkes and J. Niinist{\"o} and M. Ritala",
year = "2016",
month = "9",
day = "21",
doi = "10.1016/j.nima.2016.03.037",
language = "English",
volume = "831",
pages = "2--6",
journal = "Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment",
issn = "0168-9002",
publisher = "Elsevier Scientific Publ. Co",

}

TY - JOUR

T1 - Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors

AU - Härkönen, J.

AU - Ott, J.

AU - Mäkelä, Maarit

AU - Arsenovich, T.

AU - Gädda, A.

AU - Peltola, T.

AU - Tuovinen, E.

AU - Luukka, P.

AU - Tuominen, E.

AU - Junkes, A.

AU - Niinistö, J.

AU - Ritala, M.

PY - 2016/9/21

Y1 - 2016/9/21

KW - ALD

KW - TiN

KW - Detector

KW - Bias resistor

KW - AL2O3

KW - 114 Physical sciences

KW - 116 Chemical sciences

U2 - 10.1016/j.nima.2016.03.037

DO - 10.1016/j.nima.2016.03.037

M3 - Article

VL - 831

SP - 2

EP - 6

JO - Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

JF - Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

SN - 0168-9002

ER -